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RTP500SV Rapid Thermal Processing
● Temperature Range: 100 - 1300 °C
● Heating Rate: Adjustable from 2 to 200 °C/sec
● Sealed Quartz Chamber Internal Dimensions: 215 x 140 x 14 mm
● Maximum Sample Size: 4-inch
● Temperature Setting Range: 100 - 1300 °C
● Temperature Repeatability: +/- 1 °C (6-Zone Temperature Control)
● Temperature Accuracy:
● Temperature Measurement Device: Type K Thermocouple
● Temperature Curves: Automatic recording, saving, text format conversion; supports color paged printing.
● Vacuum System: 1 MFC (Mass Flow Controller) line, stainless steel piping, mechanical pump, ultimate vacuum level 0.1 Pa.
● Pressure Control: Fully automatic vacuum pumping and gas backfilling.
● Performance at 1000°C: Dual closed-loop temperature control, steady-state temperature stability ±2 °C, continuous operation at 1000 °C > 1 hour.
● Light Source: 1.25 KW x 13 Halogen Lamps
● Power Supply: 380 V, 40 A, three-phase four-wire (three live wires, neutral wire), 50/60 Hz
● Cooling Water Supply: Tap water or circulating water, water pressure 1-3 kg/cm², flow rate 6-8 L/min.
● Cooling Method: Water cooling, air cooling, gas cooling
● Safety Features: Over-temperature alarm, over-heat alarm, over-heat automatic protection, water pressure alarm, water pressure abnormality automatic protection.
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