PH3-A1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.
Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.
PH3-A1 Phosphine Sensor PH3 Sensor Schematic Diagram
| PH3-A1 Phosphine Sensor PH3 Sensor PERFORMANCE | ||
| Sensitivity | nA/ppm in 11ppm PH3 | 550 to 900 |
| Response time | t90 (s) from zero to 5ppm PH3 | <25 |
| Zero current | ppm equivalent in zero air | <±0.3 |
| Resolution | RMS noise (ppm equivalent) | <0.03 |
| Range | ppm PH3 limit of performance warranty | 10 |
| Linearity | ppm error at full scale, linear at zero, 20ppm PH3 | <-0.6 |
| Overgas limit | maximum ppm for stable response to gas pulse | 75 |
| PH3-A1 Phosphine Sensor PH3 Sensor LIFETIME | ||
| Zero drift | ppm equivalent change/year in lab air | <±0.05 |
| Sensitivity | drift % change/year in lab air, monthly test | <10 |
| Operating | life months until 80% original signal (24 month warranted) | > 24 |
| PH3-A1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL | ||
| Sensitivity @ -20°C | %(output @ -20°C/output @ 20°C) @ 11ppm PH3 | 20 to 70 |
| Sensitivity @ 50°C | % (output @ 50°C/output @ 20°C) @ 5ppm PH3 | 130 to 160 |
| Zero @ -20°C | ppm equivalent change from 20°C | <±0.04 |
| Zero @ 50°C | ppm equivalent change from 20°C | <±0.04 |
| PH3-A1 Phosphine Sensor PH3 Sensor CROSSSENSITIVITY | ||
| H2S sensitivity | % meaured gas @ 20ppm H2S | <15 |
| NO2 sensitivity | % meaured gas @ 10ppm NO2 | <-30 |
| Cl2 sensitivity | % meaured gas @ 10ppm Cl2 | <-30 |
| NO sensitivity | % meaured gas @ 50ppm NO | <1 |
| SO2 sensitivity | % meaured gas @ 20ppm SO2 | <60 |
| CO sensitivity | % meaured gas @ 400ppm CO | <0.7 |
| H2 sensitivity | % meaured gas @ 400ppm H2 | <0.2 |
| C2H4 sensitivity | % meaured gas @ 80ppm C2H4 | <10 |
| NH3 sensitivity | % meaured gas @ 25ppm NH3 | <0.2 |
| CO2 sensitivity | % meaured gas @ 5% vol CO2 | <0.1 |
| PH3-A1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS | ||
| Temperature range | °C | -30 to 50 |
| Pressure range | kPa | 80 to 120 |
| Humidity range | % rh continuous | 20 to 90 |
| Storage period | months @ 0 to 20°C (stored in original container) | 6 |
| Load resistor | Ω | 10 to 33 |
| Weight | g | <6 |
Matched Transmitter board for PH3-A1 PH3 Sensor
4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change
Send Inquiry to This Supplier
You May Also Like
-
NH3-B1 Electrochemical Ammonia Sensor (NH3 Sensor)US$ 30 - 100MOQ: 1 Piece
-
ULPSM-O3 968-005 Ultra-Low Power Analog Ozone (O3) Sensor ModuleUS$ 30 - 80MOQ: 1 Piece
-
CM9 Electrochemical Carbon Monoxide Sensor (CO Sensor)NegotiableMOQ: 1 Piece
-
CM8 Electrochemical Carbon Monoxide Sensor (CO Sensor)NegotiableMOQ: 1 Piece
-
PSMU Series PM2.5/PM1.0 Particle SensorNegotiableMOQ: 1 Piece
-
CO/H2S-D2 Carbon Monoxide and Hydrogen Sulfide SensorUS$ 60 - 180MOQ: 1 Piece
-
NO2-A1 Electrochemical Nitrogen Dioxide Sensor (NO2 Sensor)US$ 30 - 120MOQ: 1 Piece
-
4OXV CiTiceL Oxygen Gas Sensor (O2 Sensor)US$ 30 - 80MOQ: 1 Piece
-
SO2-B4 Sulfur Dioxide Sensor (SO2 Sensor) 4-ElectrodeUS$ 60 - 88MOQ: 1 Piece
-
Individual Sensor Board (ISB) Alphasense B4 4-Electrode Gas SensorsNegotiableMOQ: 1 Piece

