PH3-B1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.
Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.
| PH3-B1 Phosphine Sensor PH3 Sensor PERFORMANCE | ||
| Sensitivity | nA/ppm in 5ppm PH3 | 600 to 1000 |
| Response time | t90 (s) from zero | <20 |
| Zero current | ppm equivalent in zero air | <-0.3 to +0.3 |
| Resolution | RMS noise (ppm equivalent) | <0.03 |
| Range | ppm limit of performance warranty | 10 |
| Linearity | ppm PH3 error at full scale,linear at zero,4ppm PH3 | -1 to -1.8 |
| Overgas limit | maximum ppm for stable response to gas pulse | 150 |
| PH3-B1 Phosphine Sensor PH3 Sensor LIFETIME | ||
| Zero drift | ppm equivalent change/year in lab air | < 0.05 |
| Sensitivity drift | % change/year in lab air, monthly test | <4 |
| Operating life | months until 80% original signal (24 month warranted) | > 24 |
| PH3-B1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL | ||
| Sensitivity @ -20°C | %(output @ -20°C/output @ 20°C) @ 5ppm PH3 | 65 to 85 |
| Sensitivity @ 50°C | %(output @ 50°C/output @ 20°C) @ 5ppm PH3 | 120 to 140 |
| Zero @ -20°C | ppm equivalent change from 20°C | <±0.5 |
| Zero @ 50°C | ppm equivalent change from 20°C | <0 to +0.2 |
| PH3-B1 Phosphine Sensor PH3 Sensor CROSS SENSITIVITY | ||
| CO sensitivity | % measured gas @ 400ppm CO | <1 |
| H2S sensitivity | % measured gas @ 20ppm H2S | <170 |
| NO2 sensitivity | % measured gas @ 20ppm NO2 | <-30 |
| Cl2 sensitivity | % measured gas @ 10ppm Cl2 | <0.1 |
| NO sensitivity | % measured gas @ 50ppm NO | <30 |
| SO2 sensitivity | % measured gas @ 20ppm SO2 | <30 |
| H2 sensitivity | % measured gas @ 400ppm H2 at 20°C | <0.3 |
| C2H4 sensitivity | % measured gas @ 400ppm C2H4 | <20 |
| NH3 sensitivity | % measured gas @ 20ppm NH3 | <0.2 |
| CO2 sensitivity | % measured gas @ 5% CO2 | <0.1 |
| PH3-B1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONSP | ||
| Temperature range | °C | -30 to 50 |
| Pressure range | kPa | 80 to 120 |
| Humidity range | % rh continuous | 15 to 90 |
| Storage period | months @ 3 to 20℃ (stored in sealed pot) | 6 |
| Load resistor | Ω | 10 to 33 |
| Weight | g | <13 |
Matched Transmitter board for PH3-B1 PH3 Sensor
4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change
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