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Lithium Tantalate has good piezoelectric, ferroelectric, acousto-optic and electro-optic effects. It is widely used in resonators, filters, transducers, as well as high-frequency surface acoustic wave devices.
Material Characteristics
Material |
3" 4" 6" LT wafer Saw/Optical grade |
Orientation |
X112°/Y28°/Y36°/Y42°/YZ or Customized |
Curie Temp |
605°C±3°C |
Doped with |
Fe |
processing capacity
Surface finish |
single or double sides polish (DLP/SLP/ SSP/DSP all available ) |
|
Thickness |
0.18/0.25/0.35/0.50/1.00 mm |
0.25/0.35/0.50/1.00 mm |
TTV |
||
BOW |
± (25µm ~40um ) |
|
Warp |
||
LTV (5mmx5mm) |
||
PLTV( |
≥98% (5mm*5mm) with 2mm edge excluded |
|
Edge |
Compl't with SEMI M1.2 with GC800# .regular at C typed |
|
Orientation flats |
available, per request |
|
Polished side Ra |
Roughness Ra |
|
Back Side Criteria |
Roughness Ra:0.5-1.0µm GC#1000 |
|
Edge Rounding |
Compliant with SEMI M1.2 Standard/refer to IEC62276 |
|
Cracks, saw marks, stains |
None |
|
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