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Help CenterXEN-TCG3880 Thermal Conductivity Sensor
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XEN-TCG3880 Thermal Conductivity Sensor Short description
The XEN-TCG3880 is a thermal conductivity gauge (TCG) made using silicon technology. The sensor chip consists of a silicon rim of 2.50 x 3.33 mm, 0.3 mm thick, in which a silicon-nitride membrane is created. In the center is a heater, with a sensor element measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the mem-brane, and this depends on several parameters, such as pressure, gas type, and material depo-sitions on the membrane. This dependence upon physical parameters allows the TCG to measure such quantities as absolute pressure, gas mixture composition, and material properties.
The standard housing for the XEN-TCG3880 is a TO-5 10-pins header, other housings are avail-able on request.
The XEN-TCG3880Pt has a class B Pt100 platinum temperature sensor on the TO-5 housing, next to the chip.
XEN-TCG3880 Thermal Conductivity Sensor Applications
Gas type measurement:
• Measurement of thermal conductivity
• Measurement of concentration of Helium, CO2, etc, in air
• Measurement of binary gas-mixture composition
Vacuum measurement:
• Vacuum measurement between 10 mPa and 10 kPa
• Sealed gas-enclosure leakage
Specifications (22°C and 1 V power supply)
| Parameter |
typ |
unit |
symbol |
notes |
| Dimensions |
||||
| size naked die |
2.50 x 3.33 |
mm2 |
||
| thickness naked die |
0.3 |
mm | ||
| thickness membrane |
1 | µm |
||
| Output |
||||
| in vacuum at 0 mbar | 130 |
V/W |
depending on production batch |
|
| temperature coefficient (0 Pa) | -0.06 |
%/K |
||
| in air at 1013 mbar | 30 |
V/W |
no upper heat sink |
|
| in air at 1013 mbar | 6 | V/W |
with upper heat sink at 20 µm |
|
| in helium at 1013 mbar | 7 | V/W |
||
| Time constant |
t | |||
| in air | 9 | ms |
||
| in vacuum | 36 | ms |
||
| Stability |
||||
| short term | 10 | ppm |
1 day, good temp + RH stabilization |
|
| long term | 1200 |
ppm |
1 year, temperature & Rel. Humidity correction |
|
| Thermopile |
||||
| resistance | 55 | kΩ |
Rtp |
|
| effective sensitivity |
1.3 | mV/K |
Stp |
Referred to temperature of heater |
| intrinsic sensitivity | 2.4 | mV/K |
Average Seebeck coefficient 0.2 mV/K, 12 leads |
|
| temperature coefficient |
0.05 |
%/K |
||
| Heater |
||||
| resistance |
0.6 | kΩ |
Rheat |
|
| temperature coefficient | 0.1 |
%/K |
||
| Thermal resistance |
||||
| membrane | 100 |
kK/W |
vacuum output divided by thermopile sensitivity |
|
| temperature coefficient |
-0.11 |
%/K |
in vacuum |
|
| membrane + gas |
23 | kK/W |
air |
|
| temperature coefficient |
-0.08 |
%/K |
air |
|
| Maximum heating voltage |
Uheat |
|||
| in air |
2.5 |
V | ||
| in vacuum | 1 | V | ||
| Sensor ambient temperature |
Without guarantee for lifetime |
|||
| minimum |
-196 |
°C |
no significant change in output |
|
| -250 |
°C |
probably no significant change in output |
||
| -250 to -273 |
°C |
reduced output |
||
| maximum |
240 | °C |
tested on similar devices, short times |
|
| Heater maximum temperature |
250 |
°C |
Long term no drift, absolute maximum rating |
|
| XEN-TCG3880Pt |
||||
| Pt100 class B |
± 0.3 |
°C |
Error at 0°C |
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