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Help CenterAutomatic Exhaust Gas Storage Cabinet-GSC827 With Smart Control Panel & 1.2mm Cold Rolled Steel 1900H*1200W*450Dmm| for Wafer Fabrication Plant
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The Automatic Exhaust Gas Storage Cabinet-GSC827 is engineered as a critical fail-safe for these high-tech environments, combining heavy-duty physical containment with ultra-responsive digital monitoring.
The Semiconductor Challenge: Protecting the Cleanroom
Wafer fabrication requires ultra-high purity (UHP) gas delivery systems. However, the storage of these gases presents a unique set of challenges:
Toxic and Pyrophoric Risks: Many process gases ignite spontaneously upon contact with air or are lethal at low concentrations.
Cleanroom Integration: Safety equipment must not shed particles or outgas, as contamination can ruin an entire batch of silicon wafers.
Automation Demands: Modern Fabs operate on smart networks where every piece of safety hardware must communicate its status in real-time.
Engineering Excellence: Features of the GSC827
1. Integrated Smart Control Panel
The GSC827 is equipped with a sophisticated PLC-based (Programmable Logic Controller) control panel. This interface provides the operator with:
Live Gas Concentration Readouts: Constant monitoring of the internal atmosphere.
System Status Indicators: Visual confirmation that the exhaust fan, sensors, and power supply are functioning within normal parameters.
Historical Data Logging: Critical for post-incident analysis and safety audits required in ISO-certified facilities.
2. 1.2mm Cold Rolled Steel Construction
When dealing with pressurized hazardous materials, the thickness and quality of the steel are non-negotiable.
Structural Integrity: Using 1.2mm premium cold-rolled steel (rather than standard 1.0mm) provides significantly higher tensile strength and impact resistance.
Laser-Precision Welding: All joints are robotic-laser welded to ensure a seamless, airtight enclosure that prevents gas migration into the cleanroom.
3. Advanced Automatic Exhaust Logic
The GSC827 does not just "blow air." It features a multi-stage logic system:
Continuous Low-Flow: Maintains a slight negative pressure inside the cabinet during normal operation.
Emergency High-Flow: If a leak is detected, the smart panel immediately ramps the fan to its maximum RPM, ensuring the hazardous gas is pulled into the scrubbed exhaust system before it can escape the cabinet doors.
Technical Specification Table
| Component | Technical Detail |
| Model Number | GSC827 (Triple Bottle Capacity) |
| External Dimensions | 1900mm (H) x 1200mm (W) x 450mm (D) |
| Shell Material | 1.2mm High-Grade Cold Rolled Steel |
| Control System | LCD Touchscreen / PLC Logic |
| Exhaust Response | Automatic Linkage (<3 seconds) |
| Safety Certification | CE, SEMI S2 Compliant (Design Ready) |
| Internal Finish | Anti-static Chemical Resistant Powder Coating |
| Alarm Output | RS485 / Dry Contact for Fab Integration |
Why 1200mm Width is Ideal for Wafer Fabs
The 1200mm width of the GSC827 is strategically designed to accommodate three large cylinders. In semiconductor processing, this often allows for:
Cylinder 1: Active Process Gas.
Cylinder 2: Purge Gas (typically Nitrogen).
Cylinder 3: Standby Process Gas.
This configuration ensures that "Hot Swaps" can be performed safely without interrupting the vacuum systems of the etching or deposition tools.
Installation in High-Tech Facilities
The GSC827 is designed for seamless integration. It features a top-mounted flange for connection to the facility's Acid/Toxic exhaust system. The bottom of the unit is equipped with heavy-duty leveling feet to ensure stability on the raised flooring often found in cleanrooms.
Frequently Asked Questions (FAQ)
Q1: Is the GSC827 compatible with PLC systems used in most Fabs?
A: Yes. The GSC827 includes standardized RS485 communication protocols and dry contact relays, making it easy for your facility's SCADA or Building Management System (BMS) to monitor the cabinet status remotely.
Q2: How does the cabinet handle pyrophoric (self-igniting) gas leaks?
A: The GSC827 is designed with an airtight seal and high-velocity exhaust to prevent the accumulation of gas. Furthermore, the 1.2mm steel body provides a fire-rated barrier that helps contain any localized flash-fire, preventing it from spreading to the rest of the facility.
Q3: Can we customize the sensor type for specific gases like Arsine or Silane?
A: Absolutely. We offer a range of specialized electrochemical and catalytic sensors. When ordering the GSC827, simply specify your gas matrix.
The Automatic Exhaust Gas Storage Cabinet-GSC827 is more than just furniture; it is a vital component of your facility's life-safety system. By combining the strength of 1.2mm cold-rolled steel with the intelligence of a Smart Control Panel, it provides the high-performance containment that modern Wafer Fabrication Plants demand.
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