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Home > Electrical & Electronics > Electrical Control System > MKS T3BIB-29916 Valve DeviceNet Interface

MKS T3BIB-29916 Valve DeviceNet Interface

Guizhou Yuanmiao Automation Equipment Co., Ltd.

1Yr

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MKS T3BIB-29916 Valve DeviceNet Interface photo-2

Negotiable MOQ: 1 Unit (Price negotiable depending on order volume and customization)

Key Specifications

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Material:

Other, Global universal model

Condition:

Other, Global universal model

Task:

Other, Global universal model

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Payment & Shipping

Payment Methods:

Port of Shipment:

China

Delivery Detail:

Delivery time depends on order quantity.

Product Details
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Material Other, Global universal model

Condition Other, Global universal model

Task Other, Global universal model

Mathematical Model Other, Global universal model

Signal Other, Global universal model

Customized Non-Customized

Structure Other, Global universal model

Operating temperature -20°C to 70°C

Output voltage 24V AC

I. Product Overview

MKS T3BIB - 29916 belongs to the T3B series of intelligent exhaust throttle valves, which are specially designed for application scenarios pursuing simple pressure control systems. It integrates control, communication and drive circuits into the throttle valve assembly, eliminating the need for separate installation of an independent pressure control electronic module, thus greatly simplifying the system architecture.

II. Working Principle

This throttle valve adopts a self-tuning control algorithm, which can automatically adjust the opening degree of the throttle valve according to the real-time pressure feedback of the system. In the high-speed operation mode, it can quickly drive the system pressure to the set point with minimal overshoot, ensuring the accuracy and stability of pressure control. It can guarantee the repeatability of process recipes without frequent intervention by operators.

III. Technical Parameters

Interface Specifications: It has a variety of interface options to adapt to different connection needs. Common ones such as KF series interfaces can realize reliable sealed connection with other equipment, ensuring airtightness during gas transmission and preventing leakage.

Material Selection: The valve seat and key components are made of high-quality materials. For example, in some models, aiming at high-temperature and strong corrosion environments, special sealing materials such as Kalrez 4079 are selected, which can withstand high temperatures of 150°C, ensuring long-term stable operation under harsh working conditions and prolonging the service life of the product.

Control Voltage: It is usually powered by a 15V power supply, providing stable power support for internal circuits and drive devices, ensuring the accurate transmission of control signals and the normal operation of actuators.
Communication Protocols: It supports a variety of I/O protocols, including common communication protocols such as RS232, facilitating data interaction with upper computers or other control systems, realizing remote monitoring and control, and enabling rapid transmission of key information such as pressure set values and valve opening feedback.

IV. Application Fields

Semiconductor Manufacturing: Precise control of the pressure in the reaction chamber is crucial during chemical vapor deposition (CVD). T3BIB - 29916 can ensure that the reaction gases are mixed in precise proportions and stably delivered, providing a stable environment for high-quality thin film deposition and improving the yield of chip manufacturing. In the rapid thermal processing (RTP) process, the rapid response and precise control of the reaction chamber pressure can effectively avoid silicon wafer damage caused by pressure fluctuations, ensuring the consistency and reliability of the process.

Solar Energy Industry: It is used in the vacuum coating process in the production of solar panels. By precisely adjusting the pressure, it ensures the uniformity of the coating thickness and improves the photoelectric conversion efficiency of the panels. In the pressure control of the load lock chamber, it can realize rapid loading and unloading, improve production efficiency, and at the same time maintain the stability of the vacuum environment in the chamber to prevent impurity contamination.
Display Panel Manufacturing: In the evaporation process of liquid crystal display (LCD) or organic light-emitting diode (OLED) panel production, precise pressure control helps organic materials or metal materials to be evenly evaporated on the substrate, ensuring the image quality and performance of the display panel.

V. Advantages in Use

Convenient System Integration: The integrated design reduces the number of system components, lowers the installation complexity and cost, and at the same time reduces potential failure points, improving the overall reliability of the system.
Precise Pressure Control: The self-tuning algorithm and high-speed response characteristics enable it to quickly and accurately adjust the pressure under complex working conditions, meeting the process requirements with extremely high pressure precision and ensuring the stability and consistency of product quality.
Wide Adaptability: The rich interfaces, material options and support for multiple communication protocols enable it to flexibly adapt to the hardware and software requirements of different application scenarios, and can be easily integrated whether it is for building a new system or upgrading and transforming an existing system.

Product Tags: MKS , T3BIB-29916