Small intelligent type PECVD,PECVD-S-150A

FOB Price

USD $30000 - $35000 / Set

1 Set(Min.Order)

Supply Ability 100 Set / Sets per Month
Payment Terms:T/T

Request Sample Customized Request Download Product Catalog

Contact Now

Get lowest price Inquiry Basket

Product Details

Place of Origin:

China

Product Description

Small intelligent type PECVD,PECVD-S-150A

Main features：

Small size,full function，Suitable for laboratory sample preparation and plasma treatment.

Set vacuum unit, gas supply system, RF source, automatic propulsion, heating furnace in on.All the controls are integrated into the touch screen control interface to make the device more intelligent and easy to operate.

Adjustable power range 0-150W; adjustable temperature range: 100-1200 degrees; adjustable sputtering region: 0-1000mm; application: metal film, ceramic film, composite film, continuous growth of various films, etc. Expandable plasma cleaning etching and other functions.

Furnace

Max. temp	1200°C
Heating zone length	440mm
Constant zone length	200mm
Temp. control	PID automatic control with 30 steps programmable，Operation interface is 7 "industrial control computer
Tube size	Ø 25，,Ø50（optional）

PE source:

Signal frequency	13.56 MHz±0.005%
Power output range	0-150W

Gas supply system	Accurate control of gas flow with high precision mass Flowmeter
Mass Flowmeter reference range（N2)	100sccm、200sccm 500sccm （optional）
Accuracy	±1.5%
Repeatability precision	±0.2%
Working pressure difference range	0.1～0.5 MPa
Max. pressure	3MPa

Vacuum unit	KF25 series bellows and manual stopper valves
vacuum	10-1 pa
The value can be displayed intuitively by the digital display vacuum tester

Contact Us

Anhui BEQ Equipment Technology Co.Ltd.

Product Categories

tube furnace	muffle furnace	cvd	pecvd
others	1700°C

New Products

Small intelligent type PECVD,PECVD-S-150A

Product Details

Product Description

Contact Us

Popular Searches

Find Similar Products By Category