OTF-1200X-RTP-II evaporation coating furnace CSS Furnace for Rapid Thermal Processing

Brief introduction

OTF-1200X-RTP-II close evaporation (CSS) furnace is a rapid evaporation tube furnace, specifically for PVD or CSS method making films. The furnace tube diameter is 11 ", in furnace pipe load sample disk can be placed 3" round or 2 "x 2" square substrate; heating elements for two groups of infrared lamp are respectively arranged on the top and bottom of the cavity, heating rates up to 20 DEG C / S; with temperature control system to control the PID30 program, the temperature control accuracy is + - 1 DEG C, and instrument panel with RS485 interface, if the instrument is equipped with temperature control software, is can be will and temperature programmed curve is derived.

Features

1, in order to reduce the heat radiation and achieve the effect of rapid cooling, the heating element is embedded in the water cooling mechanism.

2, close to the top of the heating element is arranged on the nitride aluminum substrate (phi 76mm x 0.5mm), the sample based on the more uniform temperature.

3, graphite crucible 3 "can be placed on the bottom of the heating element, used for evaporation material.

4, vacuum flange through the two silica gel O ring for sealing, through the mechanical pump of the vacuum degree can be up to 10-2torr, through the molecular pump vacuum degree can be up to 10-5torr.

Two, 5 Vacuum flanges can be moved up and down through the manual operation.

6, a digital vacuum display meter installed at the top of the flange, you can accurately measure the degree of vacuum inside the cavity.

Technical parameter

1, power supply: single phase AC208-240V (need 20A air switch)

2, vacuum cavity: high purity quartz tube, outside diameter 280mm, diameter 275mm, high 229mm

3, heating elements: two groups of IR infrared tubes, rated power 800W, total power 1600W

4, thermocouple: S type thermocouple 2, respectively, installed in the upper and lower flanges

5, working temperature: the highest temperature less than two heating zones working alone 650 DEG C, two heating area of the maximum temperature difference is less than or equal to 350 DEG C

6, heating rate: >8 ℃ /s

7, cooling rate: >10 C /s (600 ℃ -100 ℃)

8, vacuum flange: 316 stainless steel, equipped with 1 KF-25 interface, 2 1/4 "hose connector

9, vacuum gauge: digital vacuum display

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