PH3-A1 Phosphine Sensor (PH3 Sensor)
PH3-A1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.
Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.
PH3-A1 Phosphine Sensor PH3 Sensor Schematic Diagram
| PH3-A1 Phosphine Sensor PH3 Sensor PERFORMANCE | ||
| Sensitivity |
nA/ppm in 11ppm PH3 |
550 to 900 |
| Response time |
t90 (s) from zero to 5ppm PH3 |
|
| Zero current |
ppm equivalent in zero air |
|
| Resolution |
RMS noise (ppm equivalent) |
|
| Range |
ppm PH3 limit of performance warranty |
10 |
| Linearity |
ppm error at full scale, linear at zero, 20ppm PH3 |
|
| Overgas limit |
maximum ppm for stable response to gas pulse |
75 |
| PH3-A1 Phosphine Sensor PH3 Sensor LIFETIME | ||
| Zero drift |
ppm equivalent change/year in lab air |
|
| Sensitivity |
drift % change/year in lab air, monthly test |
|
| Operating |
life months until 80% original signal (24 month warranted) |
> 24 |
| PH3-A1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL | ||
| Sensitivity @ -20°C |
%(output @ -20°C/output @ 20°C) @ 11ppm PH3 |
20 to 70 |
| Sensitivity @ 50°C |
% (output @ 50°C/output @ 20°C) @ 5ppm PH3 |
130 to 160 |
| Zero @ -20°C |
ppm equivalent change from 20°C |
|
| Zero @ 50°C |
ppm equivalent change from 20°C |
|
| PH3-A1 Phosphine Sensor PH3 Sensor CROSSSENSITIVITY | ||
| H2S sensitivity |
% meaured gas @ 20ppm H2S |
|
| NO2 sensitivity |
% meaured gas @ 10ppm NO2 |
|
| Cl2 sensitivity |
% meaured gas @ 10ppm Cl2 |
|
| NO sensitivity |
% meaured gas @ 50ppm NO |
|
| SO2 sensitivity |
% meaured gas @ 20ppm SO2 |
|
| CO sensitivity |
% meaured gas @ 400ppm CO |
|
| H2 sensitivity |
% meaured gas @ 400ppm H2 |
|
| C2H4 sensitivity |
% meaured gas @ 80ppm C2H4 |
|
| NH3 sensitivity |
% meaured gas @ 25ppm NH3 |
|
| CO2 sensitivity |
% meaured gas @ 5% vol CO2 |
|
| PH3-A1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS | ||
| Temperature range |
°C |
-30 to 50 |
| Pressure range |
kPa |
80 to 120 |
| Humidity range |
% rh continuous |
20 to 90 |
| Storage period |
months @ 0 to 20°C (stored in original container) |
6 |
| Load resistor |
Ω |
10 to 33 |
| Weight |
g |
|
Matched Transmitter board for PH3-A1 PH3 Sensor
4-20mA Digital Transmitter Board
• Factory calibration, custom-set for immediate use
• Digital zero, sensitivity and temperature compensation
• Digital and 4-20mA output
• Biased or unbiased operation
• Calibration and range change
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