1200C Small Mini High Vacuum Degree Furnace / Vacuum Furnace Price
1200C small mini high vacuum degree furnace / vacuum furnace price
Brief Introduction of the Hi-vacuum chamber furnace:
VBF-1200X-H8 is high vacuum degree chamber vacuum furnace.
It equips a 7.5" ID x 13.4"L quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as vacuum brazing furnace for fusing small parts.
Specification of the high vacuum chamber furnace
Power | 4 KW max. | |
Voltage | Single phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed) | |
| <= 1000 °C continuously Max. 1100 °C, < 30 minutes Temperature Uniformity: +/- 2°C | |
Heating Rate | Max. 20°C/ min Recommended. 10°C/ min | |
Heating Elements | High quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200°C. | |
Quartz Tube Size & Effective Heating Area | Tube size: 8" O.D. x 7.5" I.D x 13.4" L. Heating area: 7.5" ID x 8.5" Depth (7.6Liter) Uniform Temperature zone: 4"dia x 3.5" depth in center position within +/- 5ºC Quartz tube is replaceable | |
| Stainless steel vacuum flange with dual high temperature silicone O-rings at front door. One needle valve is built into the flange for use as gas inlet. One KF25D port on left side of furnace for connection to vacuum pump. A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 300°C. The inlet and outlet ports located on the left side of furnace are used for connecting to a water chiller through two 12 mm dia. polyurethane tubes (water chiller is sold separately). | |
Pressure Measurement / Monitoring | Mechanical Vacuum Gauge (included as standard accessory) | Digital Pressure Gauge (optional) |
| Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials etc. By using KFD25, stainless steel pipe, two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum levels below: 10 mtorr (10-2 torr)via mechanical pump within 30 minutes withoutThermal Block 60 mtor(6x10-2 torr ) via mechanical pump within 30 minutes with the Quartz Thermal Block at 900C | |
| PID automatic control and auto-tune function. 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communication Port. | |
| There is a gas inlet (1/4" house adapter ) with a valve on left side of furnace Inert gas and oxygen gas flow can be introduced into the chamber via the inlet You may choose a gas mixer to deliver multiple gases with control over gas composition and flow-rate | |
Overall Dimensions | 700mm(L) x 440mm(W) x 435mm(H) | |
Net Weight | 80 kg | |
Shipping Weight | 200 lbs | |
Shipping Volume | 45"(L) x28"(W) x35"(H) | |
Warranty | One year | |
Compliance | CE Certified | |
Detailed picture of the Hi-vacuum chamber furnace with quartz chamber:
Plywood case
Payment: T/T , L/C, Paypal, etc.
Delivery: 2 weeks
How to contact us?
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