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1200C CVD Tube Furnace With One Heating Zone / CVD System for Thin Film Deposition

1200C CVD Tube Furnace With One Heating Zone / CVD System for Thin Film Deposition photo-1
US$ 1,500 - 9,999 MOQ: 1 Set
Key Specifications
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Brand Name:
CYKY
Model Number:
CYKY-OTF-1200X-HVC3 -UL
Place of Origin:
Henan, China
Payment & Shipping
Payment Methods:
Port of Shipment:
Any port in China
Delivery Detail:
Delivery time depends on order quantity.
Brand Name CYKY
Model Number CYKY-OTF-1200X-HVC3 -UL
Place of Origin Henan, China

  1200C CVD tube furnace with  one heating zone / CVD system for thin film deposition

 

The 1200C series furnace workstation consists of a 1200C series tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. . It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

 

Specification of the CVD furnace system equipment:

 

tube furnace

Casing

Double layer steel casing with air cooling.

Built in thermostat to control Cooling running automatically when case > 55C.

Processing Tube

Material: Fused quartz 

Power

2.5KW

Rated Voltage

AC 208-240V Single phase, 50/60Hz

Heating Element

Resistance wire

Working Temp.

Max. Heating Temp.: 1200CContinuous Working Temp.: 1100C

Heat-up Rate

Heat-up rate: 1~20C/min programmable

Heating Zone Length

Total heating zone: 440mmConstant Temp. Zone: 150mm 

Temp. Control

PID automatic control with 30 steps programmable segments.

Temperature accuracy: 1 C

Thermocouple: K type 

Vacuum Seal

One pair of stainless steel vacuum flange with:

one mechanical pressure gauge

two needle valves 

one KF-25 connector for the high vacuum station.

Power

100~110W

Rated Voltage

AC 208-240V Single Phase, 50/60Hz

 Vacuum Station

Structure

Mobile cart size: 600 (L) x 600 (W) x 700(H), mmMax. Loading: 600 Lbs on topVacuum sensor is included

Working Range

From 1000 mbar to <1E-7 mbar

Ultimate Pressure

<1E-8 mbar

Mass Flow Gas Control

Structure

3 channel MFC Made of 316 stainless steel with gas flow range as below:

Controller : 1~500SCCM

Different range of gas flow is available upon request 

3 Channel gas go through a Gas mixing tank: 80X120mm 

Dimension: 600(L) x 600(W) x 700(H), mm

Power

18W

Rated Voltage

AC 208-240V, Single phase, 50/60Hz

 

Detailed photos of the CVD tube furnace system/ CVD system:

1200C CVD tube furnace with one heating zone / CVD system for thin film deposition

CVD tube furnace syetem with 3 gas channels

1200C CVD tube furnace with one heating zone / CVD system for thin film deposition

other series CVD system we can supply:

1200C CVD tube furnace with one heating zone / CVD system for thin film deposition

tube furnace with high vacuum system

1200C CVD tube furnace with one heating zone / CVD system for thin film deposition

science laboratory used CVD equipment for thin film research / CVD system

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Business Type
Manufacturer, Trading Company
Year Established
2013
Factory Size
1,000-3,000 square meters
Total Employees
11 - 50 People