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CVD Furnace Reactor for Thin Film Deposition / CVD Tube Furnace Equipment
US$ 1,500 - 9,999
MOQ: 1 Set
Key Specifications
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Brand Name:
CYKY
Model Number:
CYKY-1200-CVD
Place of Origin:
Henan, China
Payment & Shipping
Payment Methods:
Port of Shipment:
Any port in China
Delivery Detail:
Delivery time depends on order quantity.
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Brand Name
CYKY
Model Number
CYKY-1200-CVD
Place of Origin
Henan, China
CVD furnace reactor for thin film deposition / CVD tube furnace equipment
Brief introduction of the 1200c CVD system:
The 1700℃ high temperature CVD vacuum tube furnace with built-in MFC gas mixing system is widely employed to treat CVD samples in various kinds of gases and be used in vacuum processing for metal and ceramic materials at the high temperature up to 1200℃
Specification of the CVD tube furnace system:
| 1 | Model | CYKY-1200-CVD |
| 2 | Display | LED display |
| 3 | Limiting Temperature | 1200℃ |
| 4 | Usable Range | ≤1100℃ |
| 5 | Heating Rate | 0~20℃/min |
| 6 | Temperature Zone | Single |
| 7 | Accuracy | ±1℃ |
| 8 | Tube Size | Φ60 × 1000 mm (Φ2.36 x 40 inch) |
| 9 | Heat Length | 440 mm |
| 10 | Constant Zone | 120 mm |
| 11 | Flange | for Φ60 mm tube |
| 12 | Gas channels | 3 |
| 13 | Gas gauge | MFC |
| 14 | Heating Element | resistance wire |
| 15 | Thermocouple | B Type |
| 16 | Max. Power | 4.0 KW |
| 17 | Working Voltage | AC 208V-240V single phase, 50/60 Hz |
| 16 | Temperature Control | PID automatic control via SCR power control |
| 17 | Heating curves | 30 segments programmable |
| 18 | Chamber Materials | Alumina fiber (Al2O3) |
| 19 | Dimensions | 700 × 600 × 1105 mm (27.6 x 23.6 x 43.5 inch) |
| 20 | Warranty | One year limited warranty |
| 21 | Compliance | CE Certified |
Standard packing list of the CVD system
| No | Item | Qty | Unit |
1 |
Operation manual | 1 | booklet |
2 |
quartz tube | 1 | pc |
3 |
Vacuum flanges | 1 | pc |
4 |
Silicon O-ring | 6 | pcs |
5 |
Al2O3 tube block | 2 | pcs |
6 |
quartz crucible | 2 | pcs |
7 |
Sample hook | 1 | pc |
8 |
Thermocouples | 1 | pc |
9 |
wrench | 1 | pc |
10 |
Protecting gloves | 1 | pair |
11 |
Screw driver | 1 | pc |
Detailed photos of the CVD tube furnace system:
Photos of the gas control system
the tube furnace part with touch screen controller and water cooling flange
two zone tube furnace
CVD tube furnace system with sliding RTP tube furnace
Send Inquiry to This Supplier
Business Type
Manufacturer, Trading Company
Year Established
2013
Factory Size
1,000-3,000 square meters
Total Employees
11 - 50 People
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