CVD Graphene Furnace / CVD System for CVD Graphene Deposition / CVD Tube Furnace
CVD graphene furnace / CVD system for CVD graphene deposition / CVD tube furnace
The 1200C series furnace workstation consists of a 1200C series tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. . It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.
Specification of the CVD furnace system equipment:
tube furnace |
Casing |
Double layer steel casing with air cooling. Built in thermostat to control Cooling running automatically when case > 55C. |
Processing Tube |
Material: Fused quartz |
|
Power |
2.5KW |
|
Rated Voltage |
AC 208-240V Single phase, 50/60Hz |
|
Heating Element |
Resistance wire |
|
Working Temp. |
Max. Heating Temp.: 1200CContinuous Working Temp.: 1100C |
|
Heat-up Rate |
Heat-up rate: 1~20C/min programmable |
|
Heating Zone Length |
Total heating zone: 440mmConstant Temp. Zone: 150mm |
|
Temp. Control |
PID automatic control with 30 steps programmable segments. Temperature accuracy: 1 C Thermocouple: K type |
|
Vacuum Seal |
One pair of stainless steel vacuum flange with: one mechanical pressure gauge two needle valves one KF-25 connector for the high vacuum station. |
|
Power |
100~110W |
|
Rated Voltage |
AC 208-240V Single Phase, 50/60Hz |
|
Vacuum Station |
Structure |
Mobile cart size: 600 (L) x 600 (W) x 700(H), mmMax. Loading: 600 Lbs on topVacuum sensor is included |
Working Range |
From 1000 mbar to <1E-7 mbar |
|
Ultimate Pressure |
<1E-8 mbar |
|
Mass Flow Gas Control |
Structure |
3 channel MFC Made of 316 stainless steel with gas flow range as below: Controller : 1~500SCCM Different range of gas flow is available upon request 3 Channel gas go through a Gas mixing tank: 80X120mm Dimension: 600(L) x 600(W) x 700(H), mm |
Power |
18W |
|
Rated Voltage |
AC 208-240V, Single phase, 50/60Hz |
Detailed photos of the CVD tube furnace system/ CVD system:
CVD tube furnace syetem with 3 gas channels
other series CVD system we can supply:
tube furnace with high vacuum system
science laboratory used CVD equipment for thin film research / CVD system
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