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CVD / PECVD Tube Furnace with Precision Mass Flow Meters (MFC) and Valves / PECVD furnace
USD $5,090 - $25,980
/ Set
1 Set(Min.Order)
- 500 Set / Sets per Month
- China port
- T/T Credit Card
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Product Details
Brand Name: | CYKY | Model Number: | CYKY-PECVD | Place of Origin: | Henan, China |
Product Description
CVD / PECVD Tube Furnace with Precision Mass Flow Meters (MFC) and Valves / PECVD furnace
Brief introduction of the PECVD system:
CYKY-PECVD is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state, and benefits:
- Lower temperature processing compared to conventional CVD.
- Film stress can be controlled by high/low frequency mixing techniques.
- Control over stoichiometry via process conditions.
- Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specification of the PECVD system
Split Tube furnace |
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Plasma RF Power Supply |
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Anti-corrosive Pressure Gauge |
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Vacuum Pump and valve |
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Mass Flow meters |
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Overall dimensions |
|
Warranty | One year limited warranty |
Detailed photos of the PECVD system:
PECVD System with sliding tube furnace for fast heating & cooling.
sliding tube furnace
Contact Us
- Zhengzhou CY Scientific Instrument Co., Ltd.
- Contact nameJibin Wang
- Phone86-371-55199322
- Addresscuizhu road, hi-tech zone Zhengzhou,Henan
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