digital portable pirani vacuum gauge

USED:  Optical Lens

Chamber Inner Size:                  Dia500mmxH500mm

Vacuum Chamber Dome:              Vertical Front-Opening door (50 lens/dome )

Chamber Material                    Stainless Steel  SUS 304

Vacuum System                     Diffusion pump:KT-400         

                                  Mechanical Pump: 2X-70                              

Electronic Gun                      8/10KV

Thin Film Depostion Systems             JYK-MHY          

Vacuum Gauge                      ZDF5227              

Ultimate Vacuum                    6.0X10-4Pa 

Static Leakage Rate                  0.67Pa/h

Cooling Mode                      Water circulation cooling 

                                  1 set of control cabinet 

Control Mode                       7inch, color touch screen

                                  PLC programmable                                       

Other Parameter                     Water pressure: > 0.2 to .6 Mpa, 80 l/m                                       

                                  Water temperature: <25ºC 

                                  Air pressure: 0.4 to 0.6 Mpa

Manual for Each Parts                For each components must have a manual of

                                  Operation and maintenance version in English

Tool Box                           A complete set of tool for maintenance