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Help CenterTherm-O-Disc Bimetallic Thermal Switches 36TXE22/36TXE21、36TXE26 for Semiconductor Butterfly Valve & Swing Valve
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Bimetallic Thermal Switches 36TXE22/36TXE21/36TXE26 for Semiconductor Butterfly & Swing‑Valve Assemblies: Safeguard Vacuum‑Tool Uptime and Process Consistency
T-O-D® / Therm-O-Disc®bimetallic thermal switches (36TXE22/36TXE21/36TXE26) from Sensience are purpose‑built for semiconductor butterfly valves and swing‑valve actuator assemblies, delivering reliable over‑temperature cut‑off without complex auxiliary electronics. Using proven bimetallic disc actuation, these mechanical switches trigger circuit opening or closing at pre‑calibrated temperature thresholds, providing fast, local thermal protection for valve drive units, solenoid coils and surrounding hardware when operating temperatures exceed design limits. No software logic, no power‑dependent sensing chains; protection activates instantly when heat builds up, preventing permanent component damage and avoiding wafer‑batch scrap caused by valve malfunction.
Designed for the harsh conditions inside semiconductor vacuum equipment, these thermal switches offer key advantages for valve integration:
Precise, stable trip points: Tightly‑controlled switching temperature tolerances, supporting both automatic‑reset and manual‑reset configurations to match valve safety logic.
Maintaining stable contact performance
Compact form factor: Small footprint enables direct mounting onto valve actuators, coil housings or heat‑generating surfaces, ideal for space‑constrained vacuum‑tool cabinet layouts.
RoHS‑compliant, with wide operating voltage options for 24 VDC industrial control loops common on vacuum valve systems.
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Flexible customization: Custom trip temperature and terminal styles to align with butterfly‑valve and swing‑valve OEM specification requirements.
Types of thermal switches commonly used in vacuum butterfly valve and vacuum swing valve:
36TXE21 L95-15C
36TXE22 14443 F55-10 213507
36TXE22 14702 F80-10C 263374
36TXE22 14585 F100-10C
36TXE26 623-00058 L115C
36TXE26 L148C
36TXE26 2829 240994
36TXE26 2901 305992 L165C
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