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AMAT 0010-23716 is a PMAX temperature measurement/emitance probe assembly specially designed by Applied Materials (abbreviated as AMAT) for semiconductor manufacturing equipment. Here is a detailed introduction to it:
I. Product Positioning and Functions
Core Function: Real-time monitoring and control of the temperature distribution and heat radiation during semiconductor manufacturing processes, especially ensuring uniform wafer temperature in high-temperature processes (such as annealing, oxidation, diffusion, etc.).
Application Scenarios: As a key component of semiconductor manufacturing equipment (such as the PMAX series heat treatment equipment), it supports wafer-level temperature feedback, optimizes process parameters, and improves product yield.
Technical Characteristics
High Precision Sensing: Utilizes advanced infrared or spectroscopy technology to capture minute temperature variations, with an accuracy of typically ±1% (dependent on calibration).
High Temperature Resistance Design: Made of high-temperature resistant ceramics or metal alloys, suitable for high-temperature processing environments ranging from 500°C to 1200°C (refer to equipment specifications for details).
Modular Structure: Adapts to the space limitations of wafer processing chambers, facilitating quick replacement and maintenance, and reducing downtime.
Non-contact Measurement: Based on infrared radiation or spectroscopy analysis, avoiding physical contact that may cause contamination or damage to the wafer.
Multi-Region Monitoring: Supports simultaneous monitoring of temperature distribution in multiple regions, providing real-time data feedback to achieve closed-loop control.
Compatibility and Integration
Deep Integration: Seamless compatibility with AMAT PMAX launcher and heat treatment system, supporting high-speed data transmission and control signal interaction.
Calibration Support: Supports in-situ calibration or offline calibration to ensure long-term measurement accuracy.
Application fields
Semiconductor manufacturing: Control of high-temperature processes in the production of integrated circuits (IC), power devices, and compound semiconductors.
Photovoltaic industry: Optimization of thermal treatment processes for solar cell wafers.
Research and laboratories: Research on high-temperature materials and development of processing techniques.
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