Plasma Cleaner BMS-150
Plasma cleaner BMS-150
Ø 1)Ultra-cleaning and modification of surfaces of metals, ceramics, glass, silicon wafers, plastics, etc. with various geometric shapes and surface roughness. Thoroughly remove organic contaminants from the sample surface.
Ø 2)Timed processing, fast processing, and high cleaning efficiency.
Ø 3)It is environmentally friendly, does not use chemical solvents, and has no secondary pollution to samples and the environment. Ultra-cleaning is carried out under normal temperature conditions, and the sample is non-destructively treated.
Power |
AC220V、50/60HZ |
Max. output power |
150W |
Frequency |
13.56 MHz±0.005% |
Chamber |
Φ165*210,quartz |
Observation window size |
Φ148 |
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