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CVD System consists of tube furnace,gas supply system and vacuum unit. | |
|
Split vacuum tube furnace BTF-1200C |
BTF-1200c can supply vacuum&atmosphere protection environment . It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed. Pneumatic spring structure make the operator easy to open it. |
Tube size |
Φ50 ×1000mm（tube size can be optional) |
Heating element |
Fe-Cr-Alloy adopted by Mo |
Zone length |
Heating :440mm Constant:200mm |
|
Temperature controller |
*30 programmable segments for precise control of heating rate ,cooling rate and dwell time. *Built in PID automatic tune function with overheating&brocken thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants. |
Accuracy |
±1℃ |
Suggest heating rate |
15℃/min |
Standard accessories |
quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc. |
Gas-supply system 3 channels MFC,GMF-3Z | |
Connector style |
Double cutting ferrule stainless steel connector |
Standard range(N2) |
50sccm、100sccm、200sccm(optional) |
Accuracy |
±1.5%FS |
Linearity |
±0.5～1.5% |
Working pressure range |
0.1～0.5 MPa |
ure |
3MPa |
Connector |
Φ6,1/4'' |
Display |
LCD touch screen 3 figrues show |
Working tem. environment |
5~45 High purity gas |
Pressure vacuum gauge |
-0.1~0.15 MPa（0.01 MPa/grid） |
Inter&exter Parabolic ss pipe |
Φ6 |
Low vacuum unit，Vau-02 | |
Relative air humidity |
≤85% |
Working voltage |
220V±10% 50~60HZ |
Air bleed rate |
8m³/h |
Experiment vacuum |
1.0X10-1Pa |
Oil capacity |
1.1L |
Inlet/Outlet caliber |
KF25 |
Rotation rate |
1450rpm |
Noise |
50dB |
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