Introduce 150-mm 4HN Silicon Carbide Epitaxial Wafers
Homray Material Technology is a manufacturer of conductive and semi-insulating silicon carbide wafers and SiC 4H 100mm 150mm Epi wafer. SiC is a high-performance semiconductor material used in production of a broad range of lighting, power and communication components, including light-emitting diodes(LEDs), power switching devices and RF power transistors for wireless communications.
Item |
SiC N-Type Epi Wafer |
SiC P-Type Epi Wafer |
Size |
3inch/ 4inch/ 6inch |
3inch/ 4inch/ 6inch |
Poly-type |
4H |
4H |
Dopant |
Nitrogen |
Aluminum |
Doping Density |
ND-NA |
NA-ND |
Silicon Surface |
9E14~1E19cm-3 |
9E14~1E19cm-3 |
Tolerance |
±15% |
±50% |
Uniformity |
≤10% |
≤20% |
Thickness |
0.2~50μm |
|
Tolerance |
±10% |
±10% |
Uniformity |
≤10% |
≤10% |
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