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MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor

MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor photo-1
MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor photo-2
MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor photo-3
Negotiable MOQ: 1 Piece (Price negotiable depending on order volume and customization)
Key Specifications
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Brand Name:
MEMSIC
Place of Origin:
United States
Model Number:
MFC2030/MFC2070
Payment & Shipping
Payment Methods:
Port of Shipment:
HK
Delivery Detail:
7 days
Brand Name MEMSIC
Place of Origin United States
Model Number MFC2030/MFC2070
Usage Other, Gas Flow Sensor
Output Digital Sensor

High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/-3.0% accuracy. 

The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The  module  has  very  low  operating  power consumption (
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor FEATURES
•  Bi-directional flow
•  High dynamic range
•  ±3% m.v. accuracy
•  ±0.6% m.v. repeatability
•  Low power consumption
•  Fast response time
•  Single 2.7 - 5.5Vdc power supply
•  Digital I2C and analog outputs
•  Standard fitting sizes
•  Custom fluid connector available
•  Temperature compensated
•  Highly configurable firmware
•  Easy-to-use PC-based GUI
•  RoHS and WEEE compliant

MFC2030/MFC2070 Digital MEMS Gas Flow Sensor APPLICATIONS
• Medical gas flow measurement and control
• Industrial gas flow measurement and control
• Consumer products

MFC2030/MFC2070 Digital MEMS Gas Flow SensoCHARACTERISTICS
(Measurements performed with air at 23°C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.

Parameter
Condition
30 SLM
70 SLM
Unit
Measurement Range
Direct port
+/- 30
+/- 70
SLM
Flow Direction

Bi-directional
N/A
Supply DC Voltage (VDD)

2.7 - 5.5
Vdc
Interface Voltage (VDDIO)
(See note 1)
2.7 - 3.0
V
Output Range
I2C Mode
0 - 65,535
LSB
Analog Mode
0 - VDDIO
Vdc
Operating Temperature

(20) - 80
°C
Calibrated Temperature

0 - 50
°C
Storage Temperature

(40) - 85
°C
Relative Humidity
non-condensing
0 - 95
%
Supply Current
Continuous, Fs = 100Hz
5 mA
Sleep mode
100 µA
Accuracy
1% Qmax ≤ Q max
3.0 % m.v.
Q max
0.03 % FS
Repeatability
ODR =100Hz
0.1Qmax ≤ Q ≤ Qmax
0.6 % m.v.
Q max
0.06 % FS
ODR =10Hz
0.1Qmax ≤ Q ≤ Qmax
0.2 % m.v.
Q max
0.02 % FS
ODR =1Hz
0.1Qmax ≤ Q ≤ Qmax
0.05 % m.v.
Q max
0.005 % FS
Offset Shift w/Temp.
0 - 50°C
2 SCCM/°C
Span Shift
0 - 50°C
0.1
% m.v./°C
Pressure Drop
Q max
4 18 mbar
Sample Rate/Response Time

10 ms
Orientation Sensitivity

TBD
% m.v
Wake Time
Wake up from sleep mode
40 ms
Working Pressure

0 - 8
Bar
Module Weight
Includes aluminum inserts
g
Wetted Material
Si, SiO 2 , Si 3 N 4 , Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber,
Aluminum alloy 3003, Epoxy, Silicone


MFC2030/MFC2070 Digital MEMS Gas Flow SensoABSOLUTE MAXIMUM RATINGS

Supply Voltage (VDD)
2.7 to +5.5V
Storage Temperature
-40°C to +85°C
Pressure
0 - 8 Bar Gauge
Shock
10g, 0.5ms
Vibration
1g, 5 to 200 Hz
ESD
4kV/8kV (contact/air discharge)


MFC2030/MFC2070 Digital MEMS Gas Flow SensoORDERING INFORMATION


Product Tags: Gas Flow Sensor , MEMS Flow Sensor , Air Flow Sensor

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Business Type
Distributor/Wholesaler
Year Established
2014
Overseas Office
Yes
Total Employees
101 - 200 People