MFC2030/MFC2070 Bi-Directional Digital MEMS Gas Flow Sensor
High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on MEMSIC’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/-3.0% accuracy.
The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital or analog output with very high repeatability. The module has very low operating power consumption (
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor FEATURES
• Bi-directional flow
• High dynamic range
• ±3% m.v. accuracy
• ±0.6% m.v. repeatability
• Low power consumption
• Fast response time
• Single 2.7 - 5.5Vdc power supply
• Digital I2C and analog outputs
• Standard fitting sizes
• Custom fluid connector available
• Temperature compensated
• Highly configurable firmware
• Easy-to-use PC-based GUI
• RoHS and WEEE compliant
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor APPLICATIONS
• Medical gas flow measurement and control
• Industrial gas flow measurement and control
• Consumer products
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor CHARACTERISTICS
(Measurements performed with air at 23°C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply, unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.
| Parameter |
Condition |
30 SLM |
70 SLM |
Unit |
|
| Measurement Range |
Direct port |
+/- 30 |
+/- 70 |
SLM |
|
| Flow Direction |
Bi-directional |
N/A |
|||
| Supply DC Voltage (VDD) |
2.7 - 5.5 |
Vdc |
|||
| Interface Voltage (VDDIO) |
(See note 1) |
2.7 - 3.0 |
V |
||
| Output Range |
I2C Mode |
0 - 65,535 |
LSB |
||
| Analog Mode |
0 - VDDIO |
Vdc |
|||
| Operating Temperature |
(20) - 80 |
°C |
|||
| Calibrated Temperature |
0 - 50 |
°C |
|||
| Storage Temperature |
(40) - 85 |
°C |
|||
| Relative Humidity |
non-condensing |
0 - 95 |
% | ||
| Supply Current |
Continuous, Fs = 100Hz |
5 | mA |
||
| Sleep mode |
100 | µA |
|||
| Accuracy |
1% Qmax ≤ Q max |
3.0 | % m.v. |
||
|
Q max |
0.03 | % FS |
|||
| Repeatability |
ODR =100Hz |
0.1Qmax ≤ Q ≤ Qmax |
0.6 | % m.v. |
|
|
Q max |
0.06 | % FS |
|||
| ODR =10Hz |
0.1Qmax ≤ Q ≤ Qmax |
0.2 | % m.v. |
||
|
Q max |
0.02 | % FS |
|||
| ODR =1Hz |
0.1Qmax ≤ Q ≤ Qmax |
0.05 | % m.v. |
||
|
Q max |
0.005 | % FS |
|||
| Offset Shift w/Temp. |
0 - 50°C |
2 | SCCM/°C |
||
| Span Shift |
0 - 50°C |
0.1 |
% m.v./°C |
||
| Pressure Drop |
Q max |
4 | 18 | mbar |
|
| Sample Rate/Response Time |
10 | ms |
|||
| Orientation Sensitivity |
TBD |
% m.v |
|||
| Wake Time |
Wake up from sleep mode |
40 | ms |
||
| Working Pressure |
0 - 8 |
Bar |
|||
| Module Weight |
Includes aluminum inserts |
g |
|||
| Wetted Material |
Si, SiO 2 , Si 3 N 4 , Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber,
Aluminum alloy 3003, Epoxy, Silicone
|
||||
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ABSOLUTE MAXIMUM RATINGS
| Supply Voltage (VDD) |
2.7 to +5.5V |
| Storage Temperature |
-40°C to +85°C |
| Pressure |
0 - 8 Bar Gauge |
| Shock |
10g, 0.5ms |
| Vibration |
1g, 5 to 200 Hz |
| ESD |
4kV/8kV (contact/air discharge) |
MFC2030/MFC2070 Digital MEMS Gas Flow Sensor ORDERING INFORMATION
Send Inquiry to This Supplier
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