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Home > Electrical & Electronics > Sensor > Pressure Sensor > FS8001/FS8003 MEMS Mass Flow Sensors

FS8001/FS8003 MEMS Mass Flow Sensors

Name: FS8001/FS8003 MEMS Mass Flow Sensors
Brand: Siargo
SKU: 157070936

FS8001/FS8003 MEMS Mass Flow Sensors thumbnail-1

FS8001/FS8003 MEMS Mass Flow Sensors thumbnail-2

FS8001/FS8003 MEMS Mass Flow Sensors photo-1

FS8001/FS8003 MEMS Mass Flow Sensors photo-2

Negotiable MOQ: 1 Piece (Price negotiable depending on order volume and customization)

Key Specifications

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Brand Name:

Siargo

Place of Origin:

United States

Model Number:

FS8001/FS8003

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Shenzhen Isweek Ltd.

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Delivery Detail:

7 days

Product Details
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Brand Name Siargo

Place of Origin United States

Model Number FS8001/FS8003

Usage Other, Mass Flow Sensor

Theory Other

Output Other, Non-linear, Analog voltage/I2C

FS8000 Series Gas Flow Sensors Description
The FS8000 mass Flow sensors are designed and manufactured using MEMS flow sensor and package technology.

The FS8000 mass Flow sensors are developed preliminarily for die-attachment equipment air flow path control during pick and placement, and possibly for other instrumentation applications.

The packaging enclosure id made of the chemically inert and thermally stable polyphenylene sulfite (PPS,FS8001) or polycarbonate (PC, FS8003) material.

The FS8000 requires a power supply of 8~24 Vdc, and provides an analog output of 0.5~4.5 Vdc corresponding to the flow rate from 0 to full scale.

FS8000 Series Gas Flow Sensors Features
- Fast response time
- High sensitivity
- Low pressure drop
- Miniature design for easy installation

FS8000 Series Gas Flow Sensors Mechanical Dimensions

FS8001 Series Gas Flow SensorsSpecifications

Parameter	FS8001	FS8003	Unit
Flow Range	(0~500) sccm	(0~6) SLPM
Accuracy	± (2+0.5FS)		%
Repeatability	± 1.0		%FS
Output	Non-linear, Analog voltage/I2C
Analog Output Range	0.5 ~ 4.5		Vdc
Null Shift			mVdc
Output Shift	±0.12		%/℃
Response Time	5		ms
Power Supply	8 ~ 24 Vdc, 50 mA
Operating Current	17		mA
Max. Working pressure	0.5		MPa
Working Temperature	0 ~ +55		℃
Storage Temperature	-20 ~ +65		℃
Humidity
Mechanical Connection	M5	Rc 1/8(Inlet), M5 (Outlet)
Connector	SM05B-SRSS-TB (JST)
Calibration	Air (@ 20℃, 101.325kPa)