Contact Platform Support
Help Center1kW/2450MHz Microwave Plasma CVD
Related Products
Specifications
GMPS-2010K RectangularCavity Microwave Plasma System.GMPS-2010K RectangularCavity Microwave Plasma System
Features:
1.0kW/2450MHz microwave power source with programmable control system provides adjustable output power from 0.1 to 1.0kW with low ripple and precisely regulation.
Circulator, tuner, sampling dummy load and waveguides consist of transmission system, which insure isolation between magnetron and reflecting wave, and regulate best matching.
The special designed wave guide with slots coupled large area microwave rectangular cavity as the reacting applicator is the outstanding one we recent developed. It has very promise to excite an intense spatially stable plasma where the substrates be placed and realize a large area substrates films MPCVD with stable operation.
Built in high vacuum system and two fine MFC systems.
With Sample supporter moveable and temperature auto control
Application: MPCVD research and middle-mass production for diamond or various kinds of films.
Specification | |
Frequency |
2450±50MHz |
Power Output |
0.3-1kW Continue Adjustable |
Power Stability |
< ±2% ( at specific Power level ) |
Wave guide |
WR-340 with FD-340 Flange |
Control Interface |
RS-232 Program Controllable |
Power Supply |
380V±10% 3 Phase 4 Line |
Cooling Water |
> 3 L / min |
System VSWR |
≤ 1.2 |
Leakage |
< 5mW/cm2 ( IEC Standard ) |
Window Dimension |
440L×200W×15H mm |
Vacuum System |
P < 1×10-1 Pa. |
Gas MFC System |
2 MFC ( Mass Flow Control ) |
Send Inquiry to This Supplier
You May Also Like
-
Drum Weigh/Inspenction/IsolationNegotiableMOQ: 1 Set -
Basement Dehumidifier System Precision 20l HumidityUS$ 1 - 10000MOQ: 1 Piece
-
Automatic Brick Making Machine Equipment Cement Brick Making Machinery From China Construction Compressed Brick Making MachineUS$ 399 - 1142MOQ: 1 Set
-
Tu0 C1011 C10100 C110 Pure Copper Bar Customized Industrial Seamless Good QualityNegotiableMOQ: 1 Ton
-
Perkins Engine 404-22 Original Brand New 4-cylinder GN71039 24.3KW/1800CNegotiableMOQ: 1 Piece
-
Metallographic Sample Thin Section Equipment/Specimen Cutting MachineUS$ 22183.35 - 23093.07MOQ: 1 Set
-
Waste Car Radiator Crushing Separating Machine Scrap AC Radiator Recycle MachineUS$ 37865MOQ: 1 Set
-
All Kinds Wax Crayon Making Machine for SaleNegotiableMOQ: 1
-
Slip Ring DHK012-IINegotiableMOQ: 1 Set
-
15m Motorcycle Production Assembly Line Cheap MarketingNegotiableMOQ: 1
