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High Vacuum Turbomolecular Vacuum Pump for CVD PVD System Vacuum Measurement System

High Vacuum Turbomolecular Vacuum Pump for CVD PVD System Vacuum Measurement System photo-1
US$ 15000.00 - 15000.00 MOQ: 1 Set
Key Specifications
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Place of Origin:
Henan, China
Brand Name:
CYKY
Model Number:
turbomolecular vacuum pump
Payment & Shipping
Payment Methods:
Port of Shipment:
Zhengzhou port etc.
Delivery Detail:
Delivery time depends on order quantity.
Place of Origin Henan, China
Brand Name CYKY
Model Number turbomolecular vacuum pump
Theory Vacuum Pump
Structure Multistage Pump
Usage Air Pump
Power Electric
Standard or Nonstandard Nonstandard
Fuel Other, electricity
Pressure High Pressure
Application Sewage

33 L/s Compact Turbo Vacuum Pump System (up to 1E-7 mbar) with Gauge, Ball Valve & SS Bellows

turbomolecular pump

Introduction of turbomolecular pump

World-famous Pfeiffer vacuum station made in Germany consists of diaphragm pump as backing

pump and turbo-molecular pump, with complete accessories,

including vacuum gauge with KF25 port ,  SS vacuum bellows with KF40 port,  & LCD digital display

and ball valve together, right now bring the customer

a plug-and-play system with vacuum range from 1E-3 to 1E-7 mbar, which means the customer just

presses the power switch and then get high vacuum level

in short time at very low noise.  It is an ideal tool for most of MTI's tube furnace to achieve high vacuum >10-5 torr.

turbomolecular pump

Technical parameters of turbomolecular pump

  turbomolecular pump

Connection

   

Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge

Vacuum gauge with KF25 port to install to T -tube

Right angle high vacuum valve with KF40 port, which connects between  T- vacuum tube and SS vacuum bellows

600 mm length SS vacuum bellows with KF40 port to connect to furnace flange

One  KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on flange

Ultimate Pressure

  <7.5E-9Torr (1E-6Pa) without any leaking

Start-up Time

   2 Min.

Working Range

   From 750Torr to <7.5E-8Torr (1E5Pa ~ <1E-5Pa)

Backing Pump's Pumping Speed

   0.9m^3/H (15L/min) at 50Hz and 1.0m^3/H (16.6L/min) at 60Hz

Turbo Pump's Pumping Speed

Nitrogen    N2     33 L/s

Helium      He     39 L/s      ( 2340L/minute)

Hydrogen  H2     32 L/s

For customer's reference: 
1. Please go to bigger pump HVS-3 for bigger volume over 10L in volume, this pump is too small to vacuum MTI's tube or other chambers over 10L 
2. The station's total pumping speed can not be simply equal to the Backing Pump Speed + Turbo Pump Speed, see below table for vacuum rate reference  

Time ( Minute(s) )

Pressure (Torr)

Time ( Minute(s) 

Pressure (Torr)

0

760 (Atmosphere)

5

1.37 x 10^-2

1

15

6

1.29 x 10^-2

2

2.70 x 10^-2

15

 6.7 x 10^-3 

3

1.66 x 10^-2

180

1.05 x 10^-5

 

Current

4A max. 

Mains Connection

90-132 V/ 185-265V (Universal)

Weight

15 Kg

Warranty

 One year manufacture warranty 

 More photos of turbomolecular pump

Packaging & Shipping

 High vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement system

 

Our Services

 

1.One  year free warranty.

2.All machines are debugged before shipment.

3.Lifetime technical support  and service.

4.24 hours on line or phone or by email technical support.

5.We offer detailed machine manual and software manual.

6.Our factory make a vivid training CD.

7.Life-long free maintenance.

8.Free training in our factory.

Welcome to visit our factory, learn machine face to face.

 

24-hours online service makes your inquiry be reply immediately.

 

Company Information

 

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing 
 
and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main 
 
products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and 
 
customized lab equipment.Welcome you come to visit us.

 

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Business Type
Manufacturer, Trading Company
Year Established
2013
Factory Size
1,000-3,000 square meters
Total Employees
11 - 50 People