High Vacuum Turbomolecular Vacuum Pump for CVD PVD System Vacuum Measurement System
33 L/s Compact Turbo Vacuum Pump System (up to 1E-7 mbar) with Gauge, Ball Valve & SS Bellows
turbomolecular pump
Introduction of turbomolecular pump
World-famous Pfeiffer vacuum station made in Germany consists of diaphragm pump as backing
pump and turbo-molecular pump, with complete accessories,
including vacuum gauge with KF25 port , SS vacuum bellows with KF40 port, & LCD digital display
and ball valve together, right now bring the customer
a plug-and-play system with vacuum range from 1E-3 to 1E-7 mbar, which means the customer just
presses the power switch and then get high vacuum level
in short time at very low noise. It is an ideal tool for most of MTI's tube furnace to achieve high vacuum >10-5 torr.
turbomolecular pump
Technical parameters of turbomolecular pump
turbomolecular pump
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Connection
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Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge Vacuum gauge with KF25 port to install to T -tube Right angle high vacuum valve with KF40 port, which connects between T- vacuum tube and SS vacuum bellows 600 mm length SS vacuum bellows with KF40 port to connect to furnace flange One KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on flange |
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Ultimate Pressure |
<7.5E-9Torr (1E-6Pa) without any leaking |
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Start-up Time |
2 Min. |
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Working Range |
From 750Torr to <7.5E-8Torr (1E5Pa ~ <1E-5Pa) |
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Backing Pump's Pumping Speed |
0.9m^3/H (15L/min) at 50Hz and 1.0m^3/H (16.6L/min) at 60Hz |
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Turbo Pump's Pumping Speed |
Nitrogen N2 33 L/s Helium He 39 L/s ( 2340L/minute) Hydrogen H2 32 L/s For customer's reference:
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Current |
4A max. |
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Mains Connection |
90-132 V/ 185-265V (Universal) |
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Weight |
15 Kg |
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Warranty |
One year manufacture warranty |
More photos of turbomolecular pump
1.One year free warranty.
2.All machines are debugged before shipment.
3.Lifetime technical support and service.
4.24 hours on line or phone or by email technical support.
5.We offer detailed machine manual and software manual.
6.Our factory make a vivid training CD.
7.Life-long free maintenance.
8.Free training in our factory.
Welcome to visit our factory, learn machine face to face.
24-hours online service makes your inquiry be reply immediately.
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing
and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main
products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and
customized lab equipment.Welcome you come to visit us.
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