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Optional Gas Mixing System for Plasma Enhanced CVD Tube Furnace

Zhengzhou CY Scientific Instrument Co., Ltd.
Optional Gas Mixing System for Plasma Enhanced CVD Tube Furnace thumbnail-1
Optional Gas Mixing System for Plasma Enhanced CVD Tube Furnace photo-1
US$ 200 - 5,600 MOQ: 1 Set
Key Specifications
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Brand Name:
CYKY
Model Number:
CY gas mixing system
Place of Origin:
Henan, China
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Payment & Shipping
Payment Methods:
Port of Shipment:
Zhengzhou Qingdao etc.
Delivery Detail:
Delivery time depends on order quantity.

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Brand Name CYKY
Model Number CY gas mixing system
Place of Origin Henan, China
 

Laboratory used gas mass flow controller/3 way MFC Gas Mixer for CVD furnace

 

Application of MFC Gas Mixing System

 

Gas flow control 

1.Semiconductor manufacturing industry

2.Vacuum coating equipment

3.Special material surface treatment

4.Gas combustion control

5.Leakage detection system

6.Environment detection and analysis equipment

7.Chemical, petrochemical, metallurgy, optical fiber and etc

Feature of MFC Gas Mixing System

1.Variety gas way for option

2.304 stainless steel pipe core, corrosion resistance

3.Stainless steel double card quick connector, easy to connect, and no leakage

 

Technical parameters of MFC Gas Mixing system

 

Model no.CY-3Z
Flow meter typemass flow 
Flow meter pipe core material304 stainless steel
Valve typeelectromagnetic regulating valve
Pipeline normal conditionclose
Gas way3 gas way
Connector size1/4"
Measurement accuracy ±1.0%F.S
Linearity±0.5%F.S
Repeat accuracy±0.2%F.S
Pressure range.-0.1-0.15Mpa
A way range0-100SCCM
B way range0-200SCCM
C way range0-500SCCM
flow control range2%-100%
Zero temperature drift0.6F.S(15-35℃)
Respond time2S
Working temperature15-50℃
Working powerAC 220V 50-60Hz

 

Detailed photos of gas mixing system

 

Related products 

PECVD system with gas mixing station

Bubbleror evaporator for CVD system

Our Services

 

24-hours online service makes your inquiry be reply immediately.

 

Company Information

 

Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.

 

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Zhengzhou CY Scientific Instrument Co., Ltd.
Business Type
Manufacturer, Trading Company
Year Established
2013
Factory Size
1,000-3,000 square meters
Total Employees
11 - 50 People
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