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Laboratory used gas mass flow controller/3 way MFC Gas Mixer for CVD furnace
Application of MFC Gas Mixing System
Gas flow control
1.Semiconductor manufacturing industry
2.Vacuum coating equipment
3.Special material surface treatment
4.Gas combustion control
5.Leakage detection system
6.Environment detection and analysis equipment
7.Chemical, petrochemical, metallurgy, optical fiber and etc
Feature of MFC Gas Mixing System
1.Variety gas way for option
2.304 stainless steel pipe core, corrosion resistance
3.Stainless steel double card quick connector, easy to connect, and no leakage
Technical parameters of MFC Gas Mixing system
| Model no. | CY-3Z |
| Flow meter type | mass flow |
| Flow meter pipe core material | 304 stainless steel |
| Valve type | electromagnetic regulating valve |
| Pipeline normal condition | close |
| Gas way | 3 gas way |
| Connector size | 1/4" |
| Measurement accuracy | ±1.0%F.S |
| Linearity | ±0.5%F.S |
| Repeat accuracy | ±0.2%F.S |
| Pressure range | .-0.1-0.15Mpa |
| A way range | 0-100SCCM |
| B way range | 0-200SCCM |
| C way range | 0-500SCCM |
| flow control range | 2%-100% |
| Zero temperature drift | 0.6F.S(15-35℃) |
| Respond time | 2S |
| Working temperature | 15-50℃ |
| Working power | AC 220V 50-60Hz |
Detailed photos of gas mixing system
Related products
PECVD system with gas mixing station
Bubbleror evaporator for CVD system
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Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.
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