Tube Furnace Used Gas Mixer for Delivering Corrosive Gases / Gas Mixer
tube furnace used Gas Mixer for delivering corrosive gases / gas mixer
Brief introduction of the gas mixer:
CYEQ-CGM is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be more safe. . All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank
and flowmeter). It is designed for delivering corrosive gases,such as hydrogen sulfide (H2S) and hydrogen selenide
( H2Se) for CVD processing.
Specification of the gas mixer:
Floating meter |
Three anti-corrosive Floating Flow-meter made of PTFE material with flowing rates of 100 - 1000 mL/mi (0.1 - 1.0 L/min) One Mechanical Pressure Gauge (mixing tank): 0 - 1.0 MPa, (0.02 MPa/grit) |
Valve |
Three needle valves made of PTFE material which controls gas out-let on front panel |
Gas Tank |
500 mL gas tank made of PTFEEach channel gas will flow into the tank for mixing before flow-out |
Pipe fitting |
Pipe fitting made of PTFE and accept 1/4" pipe (nylon or stainless steel) Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart Two channel gases flow into a gas mixer container and one gas channel independent Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)12' length 1/4" PTFE pipe is included for immediate use |
Dimension |
Compact size: 340Lx300Dx 180H, mm ( 13.4"x12"x7").
Net Weight: 16 Lb |
Shipping |
Shipping dimension: TBD Shipping weight: 50 lbs |
Warranty |
Two years limited with life time support |
Related Products |
CVD & PECVD Furnace |
Display of the gas mixer
the mini tube furnace:
other gas mixer for CVD / PECVD that we have:
How to contact us?
Send Inquiry to This Supplier
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