Cz-1400 tool super hard metallizing/ arc plasma sputtering /multiple arc magnetron coating plant

 I. Ion coating equipment main model and parameters

Model

CZ-800

CZ-1000

CZ-1400

CZ-1600

CZ-1800

CZ-2200

Vacuum chamber

800*800

1000*1100

1400*1600

1600*1800

1800*3000

2200*4000

Arc target amount

4 or 6 pcs

6 or 8 pcs

12 or 14 pcs

16 or 18 pcs

30 or 32 pcs

38 or 40 pcs

bias supply

15KW/1pcs

20KW/1 pcs

40KW/1 pcs

50KW/1 pcs

60KW/1 pcs

80KW/1 pcs

Total power

30KW

40KW

65KW

80KW

125KW

195KW

Power supply type

Arc power source, filament power, pulsed bias power supply

Vacuum chamber structure

Vertical & front door, rear pumping system, double water-cooling chamber

Chambermaterial

Stainless steel

Ultimate vacuum

6.0×10^-4Pa

Pump-down time

8.0×10^-3Pa≤15min

Vacuum system

Diffusion pump or molecular pump +Roots pump +Mechanical pump+ holding pump(can be allocated by customer’s requests)

Workpiece system

Rotation of the planet forms, frequency regulation(adjusting rotation speed)

Workpiece heating temperature

From room temperature to 450°C, adjustable control(PID temperature control)

Process gas

3-channel or 4-way process gas flow control and display system, matching automatic refueling systems

Water-cooling system

Water circulation cooling system, and water tower or industrial chiller or deep-cooling system(supply by customer)

Control method

Manual/automatic all-in-one,touch screen,PLC or computer operation

Alarming and protection

Alarming for short of water, overcurrent, overvoltage and circuit break, etc of pump and target, and carry out protections and electrical interlocking functions

Other technical parameters

Water pressure≥0.2MPa,water temperature≤25°C,air pressure0.5-0.8MPa

Remarks

Configuration of coating equipment can be designed according to the requirement of the coated products