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Help CenterDrum Unit Silicon Oxide Plating Vacuum Coating Machine
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The electron beam vacuum coating machine
It is suitable for coating antireflection coating, optical filter, multicolor, red, yellow, green and blue on optics lens, electronics, acrylic, glass, lamps, mobile viewing window, glasses, lighting.
Parameter Specification
Model |
JYGX-800 |
JYGX-900 |
JYGX-1100 |
JYGX-1300 |
JYGX-13500 |
Chamber Size |
800×900 |
1050×1200 |
1100×1300 |
1300×1300 |
1350×1500 |
Coating Film Type |
Optical antireflection film, AR, broadband antireflection, single-point antireflection, optical filter and decorative film |
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Fixture |
4 pieces of arc-shaped fixtures, single arc-shaped plate revolution, 3 pieces of plates planet rotation and revolution, 12 shafts rotation and revolution (horizontal) |
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Vacuum Chamber Structure |
vertical / horizontal (304 stainless steel), vacuum system post positioned |
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Vacuum System |
slide valve pump(rotary pump), roots pump, diffusion pump, maintaining pump (optional: molecular pump, deep cold pump, deep cold system) |
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Heating System |
heated by heating tube, PID control, the max temperature: 350 degrees |
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Inflation System |
mass flow controller & electric magnetic valve |
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Electric Gun |
Electric gun 4 round shaped crucibles and a U shaped crucible, high voltage 4KV-8KV adjustable. Triangle wave, sine-wave and rectangle wave scanning are optional. |
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Resistance Evaporation Source |
2 groups of resistance evaporation source |
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Ion Source |
power 2KW, max anode current 6A. double filaments which increase the attaching force, density and reflective index of film layer (Kerr) |
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Crystal Film Thickness Controller |
crystal film thickness controller SQC-310(America)and PLC make up the fully automatic pumping and E-beam evaporation system. |
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Ultimate Vacuum |
8×104paclean and unloaded |
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Pump Time |
From atmosphere to 5×103pa less than 15 minutes |
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Controlling Method |
manual, semi-automatic, fully automatic / touching screen & PLC |
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Remark |
Can be designed according to customers request |
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