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JYC - 140160 magnetron sputtering coating equipment configuration
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Main configuration and parameters of the JYC - 1400 magnetron sputtering coating equipment
1, vacuum chamber:
(1), Size of the inner cavity: length * width * height = 1600mm x600mmx1400mm
(2), manufacturing material: 304 stainless steel manufacturing material in high quality
(3)The structure & form: The structure of vertical box type with front-loading door
(4)Yhe window of observation: equiped with two observation windows and one window on each door with manual operational sunshade, which is convenient for the observation of the working condition of the evaporation source
(5), lining plate: equipped with stainless steel lining plate at random, the guide rail in sliding structure,which is convenient for cleaning out
(6)The pattern of door-lock : Locking way of manual operation
2, Workpiece frame: Equiped with a set of artifacts whose material is stainless steel.
3, Vacuum pumping system
(1), Diffusion pump:Equiped with a set of high vacuum oil diffusion pum made in Beijing KT - 800 p, with cold trap, large pumping speed, low rate of back to the oil.
(2), Roots pump:Equiped with roots pump ZJP - 1200 made in Shanghai station
(3), The mechanical pump: Equiped with 2 x - 120 rotary vane pump made in chengdu
(4), maintain pump: chengdu 2 x 15 rotary vane pump station
(5), vacuum valves: all adopt pneumatic baffle valve and cylinder is a brand product of a professional manufacturer, famous brand combined electromagnetic reversing valve group, imports of dynamic sealing elements
(6) pipeline and deceleration shock forms: vacuum pipe, valves which is made in stainless steel. The pipeline vibration is made of stainless steel bellows
(7)Throttle valve:vacuum system with throttle valve, guarantee the stability of vacuum coating process indoor atmosphere, improve the uniformity of the coating
4, coating way: a sputtering cathode gyration gumming, parallel move in the middle.
Phi 120 cylindrical magnetron target, target materials high purity, high utilization, high coating uniformity, dc power supply (25 kw).
5, heating oven:
(1): the distribution form: stainless steel heating tube in four groups;
(2): heating power: maximum power of 16 w;
(3),:the heating temperature: 0 ~ 350 °C controllable and adjustable;
(4):The form of cooling, the input part of the indirect water cooling.
6, electrical control, manual, semi-automatic and fully automatic control mode, control by PLC + touch screen, the main components adopt domestic and Japan, French brand products.
With the protection function of overcurrent, overload and overheating. Equiped with water shortage protection functions such as alarm at the same time. The valve self-locking interlock.
7, gas supply system: with three road Beijing gas mass flow controller 300500100 0 s.
8, vacuum parameters:
(1), the extraction speed: from the atmosphere to the 5 x 10-3 pa 15 minutes or less (light, clean room)
(2), ultimate vacuum: Superior to 7 x 10-4 pa
We can make design the dimension of the vacuum chamber according to your requirement.
We can also design and configure the vacuum unit and electric controlling system according to your requirement.
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