Amplified Piezo Actuators Displacement to 500um for Micro Imaging

The amplified piezo actuator is an actuator that amplifies and outputs the displacement generated by low-voltage piezo stacks preloaded by a mechanical amplifying structure.

The amplified structure is an mechanical shell, and its material is generally steel. In addition to providing optimized pre-tightening force for piezo stacks, it also protects piezo stacks from tensile forces that can cause irreversible or even fatal damage to piezo stacks. The mechanical amplified structure also provides the user with mechanical interface, easy to integrate.

Characteristics

• 30μm to 2mm travel

• Blocking force to 540N

• Unloaded resonant frequency to 3900Hz

• Nanoscale resolution

Principle

Piezo stacks produce deformation and displacement along the main axis, that is, the long axis direction, and the elliptical mechanical structure amplifies and outputs the displacement along the short axis direction.

Application

Probe scanning, optical mirrors positioning, optical switch, shutter, wafer testing, astronomy, focus positioning, laser cavity tuning, fiber coupling and deformation, FBG deformation, chopper, interferometer, piston machining, damping, dynamic control, valves, inkjet technology, droplet generators, etc.

Type A Technical Data

Type: 500R7

Active axes:X

Stroke [μm]±20%:500

Blocking force [N]:15.0

Stiffness [N/μm]±20%:0.03

El. capacitance [μF]±20%:10.8

Unloaded resonant frequency[Hz]±20%:260

Material: steel

Sensor: optional

You can contact us for other specifications and models.