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Help CenterP51 Piezo Tilt Stage Z/Tip/Tilt Piezo Nanopositioning Stages
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Key Specifications/Special Features:
Z/Tip/Tilt Piezo Nanopositioning Stages
P51 Z/Tip/Tilt Piezo Nanopositioning Stages
Characteristics:
Z and Tip/Tilt Versions
110um Linear Travel Range
1.1mrad Tilt
Applications:
Scanning microscopy
Mask&wafer alignment
Scanning interferometry
Biotechnology
Micromanipulation
P51 series nanopositioning Z-stages and Z-tip/tilt stages are designed for alignment, nano-focusing or metrology tasks,etc. They feature a very low profile of 26.5mm, a large 100mm×100mm aperture, and offer highly accurate motion with sub-nanometer resolution.
Technical Data:
Types: P51.T1S,T51.T1K
Active axes: Z,θx,θy
Integrated sensor: SGS
Z direction travel range(0~+120V): 80(1mrad)um±20%
Z direction max.travel range(-20~+150V):110um±20%
θx,θy travel range(0~+120V): 1mrad
θx,θy max travel range(-20~+150V): 1mrad
Resolution: 0.7 (0.1urad), 0.25 (0.05urad)nm
Linearity, closed-loop:0.25%F.S.
Repeatability:0.1%F.S.
Push/pull force capacity:24/8 N
Max.load: 20 N
Electrical capacitance:1.8uF/axis ±20%
Unloaded response frequency:400Hz±20%
Response frequency @ 200g:250Hz±20%
Operating temperature range:-20~80 ℃
Material:Al
Mass: 820g±5%
Cable length:1.5m ±10mm
Model |
P51.ZT1S |
P51.ZT1K |
Units |
Active axes |
Z,θX,θY |
Z,θX,θY |
|
Sensor |
SGS |
- |
|
Nominal displacement(0 ~+120 V) |
80 |
80 |
µm±20% |
Max. displacement(-20~+150 V) |
110 |
110 |
µm±20% |
Nominal tilt angle(0 ~+120 V) |
±0.9 |
±0.9 |
mrad±20% |
Max. tilt angle(-20~+150 V) |
±1.1 |
±1.1 |
mrad±20% |
Resolution |
1(0.1urad) |
0.5(0.05urad) |
nm |
Closed-loop linearity |
0.1 |
- |
%F.S. |
Repeatability |
0.05 |
- |
%F.S. |
Push / pull force capacity |
120/15 |
120/15 |
N |
Stiffness |
1.5 |
1.5 |
N/µm |
Max. load |
1 |
1 |
Kg±5% |
El.capacitance |
3.6/axis |
3.6/axis |
μF±20% |
Unloaded resonant frequency |
200 |
200 |
Hz±20% |
Material |
Steel, Al |
Steel, Al |
|
Weight |
820 |
820 |
g±5% |
Cable length |
1.5 |
1.5 |
m±10mm |
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