XP721Piezo Flexure Objective Scanner/Linear Scanner

Key Specifications/Special Features:

XP-721 Piezo Flexure Objective Scanner

Applications:
Scanning Interferometry
Surface structure analysis
Disc-drive-test
Autofocus systems
Confocal microscopy
Biotechnology
Semiconductor testing
XP-721 is high-speed,     piezo-driven microscope objective nanofocusing/scanning devices, providing     a positioning and scanning range of 110 um with sub-nanometer resolution     and very high motion of linearity.
Technical Data:
Types: XP-721.S, XP-721.K
Active axes:Z
Integrated sensor: SGS
Travel range(0~150V):     80 um±20%
Max travel range: 110     um±20%
Resolution: 10 or 3 nm
Linearity, closed-loop: 0.2     %F.S.
Repeatability: 0.1 %F.S.
Stiffness in motion direction:     0.3 N/um±20%
Unloaded resonant frequency: 600     Hz±20%
Resonant frequency @ 120g:     250Hz±20%
Resonant frequency @200g: 200     Hz±20%
Push/pull force capacity in     motion direction: 100/20 N
Electrical capacitance: 3.6     uF±20%
Material: Al
Mass: 0.25 kg

XP-721.S Piezo Flexure     Objective Scanner is equipped with high-accuracy SGS sensor, has very high     resolution and positioning resolution, and can scan fast to position     within 100um travel. Fast response, compact structure, stability, free of     friction and easy installation with a variety of thread interface, which     can be conveniently connected with various specifications lens.
Models    XP-721.SXP-721.K    Units    
Active axes       Z    
 Sensor     SGS/-    
Nominal displacement(0~+120V)      80      μm±20%    
Max. displacement(-20~+150V)       110      μm±20%    
 Resolution     10/3     nm    
 Closed-loop linearity     0.2/-    %F.S.      
Repeatability      0.1/-      %F.S.    
Stiffness in motion direction      0.3    N/μm±20%      
Unloaded resonant frequency       500    Hz±20%    
Resonant frequency @ 120g      250    Hz±20%    
 Resonant frequency @ 200g     200      Hz±20%    
Push / pull force capacity      100/20     N    
 El.capacitance     3.6      μF±20%    
Material        Al    
 Weight     250     g±5%

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