GLJZ1200 PECVD tube furnace

PECVD tube furnace GLJZ1200, zui high temperature 1200℃, common temperature 1000℃. Temperature zone 440, constant temperature zone 260mm, compact and beautiful, high quality, after-sales service in place.     

Technical parameters of PECVD tubular furnace GLJZ1200 are as follows:

1 product name 1200℃ open tube furnace

2 product model GZJZ1200

Furnace mode open type

Display mode high brightness LED digital tube

Furnace material alumina fiber

6 heating element molybdenum-doped fe-cr aluminum alloy heating wire (OCr27Al7Mo2)

The ultimate temperature is 1200℃

Operating temperature ≤1150℃

9. Heating rate ≤20℃ (recommended :10℃/min)

Heating temperature zone single temperature zone

The length of 11 temperature zone is 440mm

12. The length of constant temperature zone is 260mm

13 furnace tube is made of high purity quartz

Diameter of furnace tube 60mm (inner diameter of furnace tube: 54mm)

The length of furnace tube is 1000mm

Sealed vacuum flange

17 air tightness 9.8× 10-4pa

18 control mode intelligent PID

Temperature control accuracy ±1℃

30 segments of "time-temperature curve" can be set arbitrarily

21 overtemperature alarm yes

Overcurrent protection has

23 the broken pair is indicated

Temperature element K thermocouple

Power supply 220V 50Hz

Rated power 3.2kw

27 overall size: 630×470×610 mm

After-sales service 12 months warranty, lifetime warranty

Packing form three-ply wooden packing box

Random accessories quartz furnace tube; Vacuum flange; The furnace tube is blocked; O-ring seal; Protective gloves; Crucible hook; The instructions.

GLJZ1200 vacuum pump configuration:

Product description:

The vacuum part of the system is composed of a high-speed direct-connected (directly driven by the motor) double-stage rotary vane oil-sealed varactor vacuum pump and peripheral vacuum components, which can be used as the main pump of medium and low vacuum systems, as well as the front pump of roots pump, diffusion pump, molecular pump and other medium and high vacuum and ultra-high vacuum systems. And equipped with oil mist filter and anti - oil device.

Main features:

1. Internal installation of forced oil pump, full lubrication, reliable performance;

2. Prevent oil return mechanism from being reliable and not returning oil;

3. When operating in the gas town, the vacuum is still high;

4. Strong ability to extract water vapor;

Technical parameters:

Model CHY - 4 c

Pumping speed

M/h (L/s) 50 hz 4 (1.1)

60 hz (1.3 4.8)

Limit partial pressure - no gas ballast

(Pa) 5 x 10-2

Limit total pressure - no gas ballast

(Pa) 5 x 10 to 1

Limiting total pressure - gas ballast

(Pa). 3

The power AC220V

The motor power

0.4/0.37 (KW)

Inlet/outlet connection

DN KF16/25 (mm)

Amount of oil

(L) 0.6 ~ 1

Motor speed

(RPM) 50Hz 1440

60 hz 1720

The float flowmeter is mainly used for gas flow testing and mixing gases in proportion to create an atmosphere environment with specific requirements for vacuum tube furnace or glove box.

Technical parameters:

Four way float gas proportioner

Product model chy-4f

Flowmeter type float flowmeter

Flow meter tube core 304 stainless steel

The pipe is normally closed

Flowmeter housing plexiglass

There are four types of gases

Interface size 1/4"

Pressure range: 0.1-0.15mpa

Gas measurement range of channel A is 10 ~ 100ml

Gas measurement range of route B is 16 ~ 160ml

The measurement range of c-channel gas is 25 ~ 250ml

The measurement range of d-channel gas is 60 ~ 600ml

Flow control range 2% ~ 100%

Working environment temperature (15 ~ 50℃)

Accuracy guarantee temperature (15 ~ 35℃)

Overall size L700×W600×H580

The weight of the equipment is 43kg