GSL-1100X-SPC-16C steaming sputtering coating machine sputtering coater

Product model

GSL-1100X-SPC-16CSteaming sputtering deposition apparatus

This equipment is required at an altitude of 1000 m, under temperature 15 ℃, 25 ℃ + humidity to 55% Rh + 55% Rh.

1, water: don't need

2, electric: AC220V 50 hz, there must be goodPick upto

3, gas: equipment interior cavity filling argon (purity over 99.99%), need to bring your own argon gas cylinder (with pressure reducing valve)

4, the workbench: size 600 mm * 600 mm * 700 mm, bearing more than 50 kg

5, ventilation: not necessary

The main features

Equipped withThe thermal evaporation attachments, can evaporate carbon silk or other materials, such as aluminum, stainless steel material, at the same time has the function of sputtering and evaporation.Thus extends the application range, especially suitable for scanning electron microscopy, the preparation of the sample.

Technical parameters

1And the target:Ø50mm

2And the sample:Ø50mm

3, vacuum chamber:Ø160mmx110mm

4And vacuum degree:4x10- 1mbar-2x102 -mbar

5, the maximum current:50mA

6And can be set the longest time:9999s

7And the highest voltage:1600V DCadjustable

8, vacuum pump:4LTwo levels of mechanical rotary pump, vacuum limit2x102 -mbar

Standard accessories

1

Gold target material

1a

2

Carbon rope

1The root

3

Tungsten wire basket

2a

4

Thermal evaporation attachment

1Set of

5

Intake of the needle valve

1a

6

The fuse

2a

Optional accessories

Gold, indium, silver, platinum, etc all kinds of target material