Contact Platform Support
Help CenterHorizontal Chemical Vapor Ddposition Furnace(C)
Related Products
-
Vertical Vapor Ddposition Furnace(C)US$ 100000 - 2000000MOQ: 1 Set -
Horizontal CVD Coating Furnace(SiC)US$ 100000 - 2000000MOQ: 1 Set
-
Vertical Thermal CVD Furnace(C)US$ 100000 - 2000000MOQ: 1 Set
-
Horizontal Vacuum Carbonization FurnaceUS$ 20000 - 4000000MOQ: 1 Set
-
Vertical Vacuum Carbonization FurnaceUS$ 20000 - 4000000MOQ: 1 Set
Description
Horizontal CVD furnace (Carbon) is applied for composite material CVD that used hydrocarbon gas (like C3H8) as carbon sources, which works on CVD and CVI treatment for carbon materials.
Technical Features
1.The furnace working zone size can be reach 2.5m×2.5m×5m, which can satisfy super size part CVD treatment.
2.Horizontal vacuum carbon furnace adopts multiple temperature control zones with great temperature uniformity.
3.Special designed deposition chamber achieves good sealing effect and strong antipollution ability.
4.Multiple deposition channels assures flow field uniformity, non-deposition dead corner and great deposition surface.
5.Tar, solid powder and organic gases are treated effectively during the deposition process.
Optional Configuration of Horizontal CVD Furnace
1. Furnace door: manual tight / auto lock-ring tight, Manual tight/Auto lock-ring tight
2. Furnace vessel: All carbon steel/Inner layer stainless steel/Total stainless steel
3. Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard composite felt /CFC
4. Heating element and muffle: Isostatic press graphite/Press high purity, high strength and high density graphite/ fine size graphite
5. Process gas system: Volume/Mass flow-meter, Manual valve/Auto valve, Foreign brand/Chinese brand
6. Vacuum pump and gauge: Foreign brand/Chinese brand
7. HMI: Simulation screen/Touch screen/Industrial personal computer
8. PLC: OMRON/Siemens
9. Temperature controller: SHIMADEN/EUROTHERM
10. Thermocouple: C type, S type, K type, N type
11. Recorder: Paperless recorder/paper recorder, Foreign brand/Chinese brand
12. Electric components: CHINT/Schneider/Siemens
13. Load truck: roller type /Fork type/Folded long distance driving type
Specifications of Horizontal CVD Furnace
| SpecModel | HCVD -060609-C | HCVD -080812-C | HCVD -101015-C | HCVD -121225-C | HCVD -151530-C | |
| Working Zone Size (W × H × L) (mm) | Φ600 × 600 × 900 | Φ800 × 800 × 1200 | Φ1000 × 1000 × 1500 | Φ1200 × 200 × 2500 | Φ1500 × 1500 × 3000 | |
| Max. Temperature (°C) | 1500 | 1500 | 1500 | 1500 | 1500 | |
| Temperature Uniformity (°C) | ±7.5 | ±7.5 | ±7.5 | ±10 | ±10 | |
| Ultimate Vacuum (Pa) | 50 | 50 | 50 | 50 | 50 | |
| Pressure Increase Rate (Pa/h) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | |
| The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements. | ||||||
Send Inquiry to This Supplier
You May Also Like
-
Horizontal Vacuum Pyrolysis FurnaceUS$ 16000 - 46000MOQ: 1 Set
-
Vertical Vacuum Pyrolysis FurnaceUS$ 16000 - 46000MOQ: 1 Set
-
Horizontal Vacuum Graphitization FurnaceUS$ 53000 - 880000MOQ: 1 Set
-
Vertical Vacuum Graphitization FurnaceUS$ 53000 - 880000MOQ: 1 Set
-
Induction Heating FurnaceUS$ 53000 - 880000MOQ: 1 Set
-
SiC & Si3N4 Sinter FurnaceUS$ 23000 - 86000MOQ: 1 Set
-
Gas Pressure Sintering FurnaceUS$ 60000 - 800000MOQ: 1 Set
-
Vacuum Pressure Impregnation FurnaceUS$ 60000 - 800000MOQ: 1 Set
-
Continuous Graphite Purification FurnaceUS$ 53000 - 880000MOQ: 1 Set
-
Pusher Type Graphite Purification FurnaceUS$ 1000000 - 8000000MOQ: 1 Set
