Laser Cell Scriber
Technical Specification:
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GSYS50A
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GSYS50B
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Accuracy of Scribing
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≦±10μm
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Line Width of Scribing
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≦50μm
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Laser Wavelength
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1064nm
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°μLaser Power
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50W
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Max. Speed of Scribing
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120mm/s
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Max. Thickness of Wafers to Be Scribed
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1.2nm
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Repetitive Frequency
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200Hz-50Hz
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Worktable Area
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350*350mm
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Accuracy for Temperature Control
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0.5°C
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Power Supply
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380V(220V)/50Hz/5Kva
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Worktable
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Absorb wafers and dust-extraction by under pressure
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Chiller
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Integrated circulated by const. temperature cooling water
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Mornitoring
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Entry-level
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Digital
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