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Model: | PECVD- Plasma enhancing chemical vapor deposition |
Brief Introduction: | In order to make the chemical reaction happen in lower temperature,this machine use the plasma activity to promote the reaction, so this CVD is called as plasma enhancing chemical vapor deposition.(PECVD) We supply the products comply with the relevant state environmental protection laws and regulations(include the requirement of ISO14000), environmental friendly; This machine fit the requirement of OHSMS18000, it is not harmful to the peoples'health who touch this machine! |
Product Usage: | Glow discharge in the plasma:High electron density: 109-1012cm3 Electron gas temperature is 10-100 times than the common gas molecule. |
Technical Parameter: | Open-type tube furnace Working temperature:1200℃ Furnace tube dimension:Φ50, Φ60, Φ80(available) Temperature controller:30 segments high precision digital programmable temper controller Heating field length:440mm Constant temperature field length:150mm Power:AC 220V 4KW Plasma RF power Output power:50-500W Max. adjustable ±1% stability RF frequency:2-150MHz ±0.005% stable adjustment Noise:≤55 DB Cooling:cooling by air Output power:1KW AC 220V Connect with KF25 series bellow pipes and precision ball valve Vacuum degree:can achieve10-3 torr Digital vacuum pressure gauge can visualized display the valve. Mass flow meter The inside high precision digital display mass flow gauge can control the gas flow accurately. Gas flow rate range:0-200 error:0.02% One gas agitator tank installs one liquid release valve. Stainless steel needle is installed on the left side, it can manual control the input quantity of the mixed gas. Air inlet:International standard double fixture cover connecter |
Specification: | Furnace body:550*380*520mm Air feed and vacuum system:600*600*597mm Net weight:120KG |
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Brief Introduction
Laizhou Weiyi experimental machine manufacturing Co.,Ltd. was established in 2001,covering 55 acres,which is one leading enterprise in the field of a professional R&D,manufacturing metallographic sample preparation erquipment. Was identified as Technology high-tech enterprises by Shandong Provincial Science , Shandong Academy of Sciences Research Building .
In 2004 the company passed the ISO9001 quality management system certification,in 2012 the company obtained CE certification, laid the foundation for a comprehensive international markets.
Contact Information:
Contact Person: Ichuka Lang
Skype: ichuka.lang
We Chat:yixiuka001
Mobile: 86 186 60056893
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