Poly and Mono Silicon Target 5N and 6N Si Target Sputtering Target
poly and mono Silicon Target
Purity: Si 4N min., 5N min. and 6N min.
Resistivity: 0.005-0.02 ohm/cm 0.02-100 ohm/cm
Dimensions
length:320mm max.
width:140mm max.
thickness:3-12mm
diameter:280mm max.
Type: Both Mono crystal silicon target and Poly crystal silicon targets with boron or phosphorus doped are available.
For more information, pls feel free to contact us.
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