Silicon Target 5N Sputtering Target Si Target

Silicon target 5N
Type: both mono crystal and poly crystal silicon target with boron or phosphorus doped are available.
Purity: Si: 99.99% min., 99.999% min. and 99.9999% min.
Resistivity: 0.005-0.02ohm·cm
0.02-100ohm.cm
Sizes:
Length: 320mm max.
Width: 140mm max.
Thickness: 3mm-12mm
Diameter: 280mm max.
Shape: all shapes can be made as per drawing.
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