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Help CenterMini CE Certified Rapid Thermal Annealing/electrode Alloying RTP Tube Furnace
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Mini CE certified Rapid Thermal Annealing/electrode alloying RTP tube furnace
Application of RTP tube furnace
1.Rapid thermal annealing/ oxidation/ nitridation
2.Silicide/diffusion
3.Compund semiconductor annealing
4.Ion implantation annealing
5.Electrode alloying
6.Alloy melting point analysis
7.Thin film deposition
Features of RTP tube furnace
1.Fast heating:200°c/second, Fast cooling:1000°c to 400°c only need 30 second
2.Multi-function,widely used in thermal annealing/oxidation/nitridation and etc.
3.LCD touch screen
4.Slide type, can manual sliding or electric sliding
5.Can connect with vacuum pump and atmosphere furnace.
Technical parameters of RTP tube furnace
| Model | CY-O1000-120IC-RTP |
| Display | LCD Touch screen |
| Chamber material | imported fiber |
| Heating element | halogen electrodes |
| Max.temperature | 1000℃ |
| Cooling rate | 1000°c to 400°c, only need 30seconds |
| Heating rate | 200°c/second |
| Heating zone | Single |
| Halogen electrode numbers | 12pcs |
| Tube Material | high purity quartz |
| Maximum sample size | 4 inch |
| Control mode | PID automatic control via SCR power control |
| Temperature accuracy | ±1℃ |
| Working voltage | AC 220V 50-60Hz |
| Main power | 7.5kw |
| Atmosphere | vacuum, nitrogen, argon, oxygen, air |
| Optional equipment | flowmeter, high vacuum system, LCD control system |
Picture of RTP tube furnace
Packaging of RTP tube furnace
PLY wood box as below picture, or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
Processing room
Show room
Contact information
Skype ID: jennyhao8819
Whatsapp/wechat/viber:008615639272359
Tel:0086-0371-55199322
Fax:0086-0371-86036875
Website:
We are always at our service in 24 hours
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