Home > Products > lab coating equipment > Two Zones CSS Furnace with two group of halogen heaters
Two Zones CSS Furnace with two group of halogen heaters
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Product Details
Brand Name: | CYKY | Model Number: | OTF-1200X-RTP-II Two zones CSS furnace | Place of Origin: | Henan, China |
Product Description
Two Zones CSS Furnace for CSS Thermal Evaporation Processing Up to 3" Dis & 650ºC. - OTF-1200X-RTP-II
Introduction of two zones CSS furnace
two zones CSS furnace
OTF-1200X-RTP-II is a two heating zone rapid thermal processing furnace with 11" I.D.quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC. It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell
two zones CSS furnace
Technical parameters of two zones CSS furnace:
Furnace structure & Vacuum Chamber
| 1.Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame 2.The chamber is made of high purity fused quartz tube 3.Quartz tube size: 11" OD/10.8" ID x 9" H 4.The vacuum flanges are made of Stainless Steel 316 5.Overall dimension: 850(L)×745(W)×1615(H) mm |
Vacuum Flanges | Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily Bottom flange has one KFD-25 vacuum port with right-angle valve and two gas inlets (1/4" pipe required) with needle valves Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump (vacuum pump is not included, please order separately) One digital vacuum gauge is installed on the top flange
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Gas Flow Meters
| Two float-meters are installed on the control panel with measurement range of: 16 -160 mL/m 400 - 4000 mL/m (for purging purpose) |
Heater and Sample Holder | Two shortwave IR lamps as heating elements The distance between two heaters is adjustable from 10 - 50 mm The heaters are installed in the water cold jacket to reduce heat radiation and allow for fast cooling Water cold jacket is made of SS316 with PTFE fitting 3" round wafer holder is built in with top heater to load substrate One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of substrate to make it heated uniformly One 3" graphite crucible can be put on the bottom heater to load evaporating materials |
Temperature Controller | Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below
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Working Temperature |
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Thermal Couple | Two K-type thermal couples are installed on top and bottom heaters separately |
Working Voltage | 208 - 240VAC, single phase, 20A air breaker |
Power Requirement | 2200W total ( 1100W for each heater ) |
Warranty | One year limited with life time support |
Furnace structure of two zones CSS furnace
Temperature controller of two zones CSS furnace
Heater and sample holder of two zones CSS furnace
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Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.
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Contact Us
- Zhengzhou CY Scientific Instrument Co., Ltd.
- Contact nameJibin Wang
- Phone86-371-55199322
- Addresscuizhu road, hi-tech zone Zhengzhou,Henan
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