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Help Center3 Rotary Target Compact Plasma Sputter Coater/Magnetron Plasma Sputtering Coater
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3 Rotary Target Compact Plasma Sputter Coater/Magnetron Plasma Sputtering Coater
Application of plasma sputtering coater
CY-16-3H is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a touch screen digital controller, and a substrate heater capable of heating up to 400°C. It can coat 1- 3 types of metallic materials to samples with diameters up to 50 mm. Three sputtering targets, Gold, Aluminum, Copper, vacuum pump, stainless steel bellows with KF25 adapters & clamps and a vapor trap are included for immediate use.
Features of plasma sputtering coater
1.Hinged type cover on top with air spring sport makes target exchange easy
2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in
3.touch screen control panel with +/- 1 degree accuracy
4.Made in Germany high speed turbo vacuum pump system
Technical of plasma sputtering coater
| Input Power |
1.220VAC 50/60Hz, single phase 2.700W (including pump) |
| Source Power | 1.Two sputtering power sources are integrated into one control box |
| 2. DC source: 500W for coating metallic materials | |
| 3.RF source: 600W with automatching for coating non-metallic materials ( Center) | |
| 4.Compact 300 RF source is available at extra cost | |
| Heating sample stage |
1.One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button.
|
| 2.The substrate heater is built in the stage with a max. heating temperature of 500°C | |
| 3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets | |
| 4.One stainless steel and one Al2O3 ceramic targets are included for demo testing | |
|
5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads | |
|
6.Customized coater: Two DC head without, RF sputtering, RF head without DC sputering,3 RF head are available upon request | |
| Vacuum Chamber | 1.Vacuum Chamber: 150mm I.D *150mm height, made of stainless steel |
| 2.Observation Window: 100 mm diameter | |
| Sample Holder | 1.Sample holder size: 47mm |
| 2. Au,Ag and Cu( 2.5mm Thick) | |
|
3.Accuracy +/- 1.0 °C Note: Al, Mg, Zn light metal can not be coated by using this coater | |
| Gas Flow Control | 1.Flow rate: 200 ml/min max. |
| 2. One needle valve installed to allow Ar gas inlet to achieve better plasma coating | |
| Vacuum Pump Station |
High speed turbo vacuum pump system is directly installed on the vacuum chamber for max. vacuum level |
|
Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed | |
|
Mobile pump station is included and the compact sputtering coater can be put on top of station | |
| Max. vacuum level: 10^-6 torr with chamber baking | |
| Overall Dimensions | L440mm× W330mm× H1300mm |
| Application Note | The system requires an Ar gas tank with a pressure regulator that are not included. |
| Net Weight | 50 kg |
| Warranty | One years limited warranty with lifetime support |
Pictures of Magnetron Plasma Sputtering Coater
Packaging of Plasma Sputtering Coater
PLY WOOD BOX as below picture show. or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Wearing parts as below:
Door stopper 1 pc, glove 1pair, crucible tongs 1pc, manual book
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
Contact information
Skype ID: jennyhao8819
Whatsapp/wechat/viber:008615639272359
Tel:0086-0371-55199322
Fax:0086-0371-86036875
Website:
We are always at our service in 24 hours
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