Lab DC/RF Single Target Mini Type Magnetron Sputtering Coating Machine
Lab DC/RF single target mini type magnetron sputtering coating machine
Application fo magnetron sputtering coating machine
CY-1100X-SPC-16M is a magnetron sputtering system featuring single target sources:
1) DC source for coating metallic material on one head
2) RF source for coating non-metallic material on the other head.
3) Three target can be coated: Au, Pt, Ag
It is equipped with a film thickness tracker to enable the user to easily monitor the coating progress and also record the data.
Features of magnetron sputtering coating machine
1.Hinged type cover on top with air spring sport makes target exchange easy
2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in
3.touch screen control panel
4.Made in Germany high speed turbo vacuum pump system,maxi. vacuum degree can reach 10-6 torr
Technical of magnetron sputtering coating machine
| Input voltage | AC 110V |
| ( 220V is avaiable via a transformer ) | |
| Input Power | < 2000W (including pump) |
| Output Power | 1600VDC |
| 50mA max. | |
| Specimen chamber | Fused glass tube, 160 mm Dia. x 120mm Height |
| Specimen stage | One 50 mm Dia.sample stage |
| Max. coating area: 45 mm | |
| Accessories included |
156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter, Bellows & KF-D25 Inlet -EQ-FYP |
| Stainless steel bellows with KFD-25 adapter and clamps | |
|
10L/min recirculating water chiller is included to cool magnetron head. | |
| Gas Atmosphere |
One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
| Target | One Au target: 50 mm dia. x 0.12 mm, 1pcs is included |
| Optional targets: | |
| Pt target (50mm dia.x0.12mm, 4N) available | |
| Ag target (50 mm dia. x 0.5mm, 4N) available | |
| Overall Dimensions | L360mm x W300mm x H380mm |
| Net Weight | 50 kg |
| Warranty & Certificate | One year limited with lifetime support |
| CE certified | |
| Knowledge of Sputter Coating |
For the best film strength, please use plasma cleaner to clean sample surface before coating |
|
For coating Al. Zinc and graphite light weight metallic material, the sputtering coating is not efficient due to low energy, please consider to use thermal evaporating ocater | |
|
The system requires an Ar gas tank with pressure regulator which is not included |
Pictures of Magnetron Plasma Sputtering coating machine
Packaging of Magnetron Plasma Sputtering Coating machine
PLY WOOD BOX as below picture show. or as customer request.
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Wearing parts as below:
Door stopper 1 pc, glove 1pair, crucible tongs 1pc, manual book
Exhibition show
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
Contact information
Skype ID: jennyhao8819
Whatsapp/wechat/viber:008615639272359
Tel:0086-0371-55199322
Fax:0086-0371-86036875
Website:
We are always at our service in 24 hours
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