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Help CenterLab MFC Gas Mixing System for CVD Tube Furnace
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lab MFC Gas Mixing System for CVD tube furnace
Application of MFC Gas Mixing System
Gas flow control
1.Semiconductor manufacturing industry
2.Vacuum coating equipment
3.Special material surface treatment
4.Gas combustion control
5.Leakage detection system
6.Environment detection and analysis equipment
7.Chemical, petrochemical, metallurgy, optical fiber and etc
Feature of MFC Gas Mixing System
1.Variety gas way for option
2.304 stainless steel pipe core, corrosion resistance
3.Stainless steel double card quick connector, easy to connect, and no leakage
Technical parameters of MFC Gas Mixing system
| Model no. | CY-3Z |
| Flow meter type | mass flow |
| Flow meter pipe core material | 304 stainless steel |
| Valve type | electromagnetic regulating valve |
| Pipeline normal condition | close |
| Gas way | 3 gas way |
| Connector size | 1/4" |
| Measurement accuracy | ±1.0%F.S |
| Linearity | ±0.5%F.S |
| Repeat accuracy | ±0.2%F.S |
| Pressure range | .-0.1-0.15Mpa |
| A way range | 0-100SCCM |
| B way range | 0-200SCCM |
| C way range | 0-500SCCM |
| flow control range | 2%-100% |
| Zero temperature drift | 0.6F.S(15-35℃) |
| Respond time | 2S |
| Working temperature | 15-50℃ |
| Working power | AC 220V 50-60Hz |
Pictures of gas mixing system
Packaging of gas mixing system
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
Payment
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Warranty
Main product is 15 month, except wearing parts.
Factory show
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.
other furnace we can manufacture
We are looking forward your order of gas mixing system
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