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Help CenterMax.1200C Auto-Sliding PECVD Tube Furnace / PECVD Tube Furnace
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Max.1200C Auto-Sliding PECVD Tube Furnace / PECVD tube furnace
Brief introduction of the Auto-sliding PECVD tube furnace:
CY- OTF-1200X-50S is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition)
tube furnace system with slidable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace
and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get
your sample an instant exposure under high temperature. This system can be updated to advanced model with options.
It is ideal tool for the researcher to make innovation under limited budget.
Lower temperature processing compared to conventional CVD.
High heating & cooling rate using sliding furnace
Film stress can be controlled by high/low frequency mixing techniques.
Control over stoichiometry via process conditions.
Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specification of the auto-sliding PECVD tube furnace:
|
Auto-Sliding Split Tube furnace
|
Input power: 208 – 240V AC, 1.2kW 1200°C Max. working temperature for < 60 minutes 1100°C Max for continuous heating High purity quartz tube 2"OD x 1.7"ID x 39.4" Length 30 segments programmable precision digital temperature controller 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C |
Plasma RF Generator |
Output Power: 5 -300W adjustable with ± 1% stability RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered seperately) Power : 208-240VAC, 50/60Hz Noe: Water cooling is necessary for long time operation |
Vacuum Flanges and Fittings |
Vacuum flange set is made of stainless steel 304. Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamps, a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support, 3/8 O.D barbed fitting, and a needle valve. Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough, a needle valve and a KF-16 quick clamp set |
Vacuum Pump |
208 - 240V / 50-60 Hz (750W Max.) 220 liters / M or 7.8 CFM Oil Mist Eliminator is included Max. vacuum: 3 X 10E-3 torr |
Product Dimensions |
Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H) Net weight: 350 lbs Shipping weight: 480 lbs |
Oxygen Monitoring (Optional) |
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. |
Warranty |
One year limited warranty
|
Display of the auto-sliding PECVD tube furnace:
the gas supply controller with MFCS.
Other PECVD tube furnace that we have:
How to contact us?
Send Inquiry to This Supplier
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