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1600C CVD three zones tube furnace system used for For deposition of Carbon and metal Oxide
The CVD-1600X-III-HVC series furnace workstation consists of a 1600X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts.
The max. working temperature of this workstation is 1600C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input
the mixed gas into a alumina tube inside the furnace. It is competent for the experiments as CVD, Diffusion and
other thermo-treatments under vacuum status and shielding gas protect.
The perameter specification of the CVD system with three zone tube furnace / CVD furnace System
1600X-III series tube furnace |
Casing |
Double layer steel casing with air cooling.Built in thermostat to control Cooling running automatically when case > 55C. |
Processing Tube |
Material: 99.8 high purity alumina |
|
Thermal Block Placement |
2 pieces |
|
Power |
7KW |
|
Rated Voltage |
AC 208-240V Single phase, 50/60Hz |
|
Heating Element |
MoSi2 Heating element |
|
Working Temp. |
Max. Heating Temp.: 1200CContinuous Working Temp.: 1500C |
|
Heat-up Rate |
Heat-up rate: 1~15C/min programmable |
|
Heating Zone Length |
Total heating zone:600mm (220mm + 200mm + 200mm) This is customized. |
|
Temp. Controller |
Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: 1C Thermocouple:B type built inside the furnace |
|
Vacuum Seal |
One pair of stainless steel vacuum flange with:- one mechanical pressure gauge- two needle valves - one KF-40 connector for the high vacuum station. |
|
Rated Voltage |
AC 208-240V Single Phase, 50/60Hz |
|
Dimension |
1100(L) x 450(W) x 670(H), mm |
|
High Vacuum Station |
Structure |
Mobile cart size: 600 (L) x 600 (W) x 700(H), mm Max. Loading: 600 Lbs on top Molecular pump control Panel : LCD digital display |
Working Range |
From 1000 mbar to <1E-7 mbar |
|
Ultimate Pressure |
<1E-8 mbar (without any leaking ) |
|
Voltage & Power |
110VAC or 220VAC, 110W |
|
Mass Flow Gas Control |
Structure |
3 channel MFC Made of 316 stainless steel with gas flow range as below: Controller : 0~500SCCM 3 Channel gas go through a Gas mixing tank: Dia 80X120mm Dimension: 600(L) x 600(W) x 700(H), mm |
Power |
18W |
|
Rated Voltage |
AC 208-240V, Single phase, 50/60Hz |
Detailed photos of the CVD system with three zones tube furnace
The gas control with Mass Flow Controller:
the gas controll system with Flowmeter controller
The 1200C Split type three zones tube furnace:
Plywood case
Payment: T/T, L/C, Paypal, etc.
Delivery: 2 weeks
How to contact us?
Send your inquiry details in the below for quotation, click " send " now!
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