Optical Experimental Vacuum Coating Machine
1. Box type, vertical before the door, evaporation chamber and air suction chamber, with close insurance open;
Between host and electric control cabinet installed metal trough (mainly connecting cable, wire, water softening
tube and soft tracheal are in metal trough), and from the host and electric control ark party all. Water, electricity,
gas and have fault automatic alarm and protect system;The buzzer alarm.
2. Inner chamber size for Φ 1300 mm (diameter) x H1500mm (high); Vacuum cavity wall thickness on 22 mm;
The wall thickness of the 22 mm 22 mm, lateral thickness 6 mm, all adopts 304 stainless steel materials, inner surface
polishing treatment, outside surface for direct welding stainless steel pipe, ventilation cooling water; Housing lining
stainless steel antifouling plate (sidewall antifouling plate thickness δ = 1.5 mm, indoor the antifouling slab
thickness δ = 2 mm two pieces of) two sets (including a set for spare), laminated structure, installation way as the
curvature of the type, in chamber body bleeding point and studio between the convenient disassembly cleaning shutter.
Anti-fouling plate for removable type, easy to clean; Vacuum indoor equipped with light a and film uniformity correction
rod 2.
3.
Adopts 304 stainless steel materials, inner surface polishing treatment, outside surface for direct welding stainless steel
pipe, ventilation cooling water cooling; Vacuum chamber door set observation window 3, the position in a central,
around the mid-lower each one, and install glass and manual rotation of protection lens, stainless steel damper with interior.
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