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Evaporation Magnetron Sputtering PVD Coating Machine
Equipment Description:
This machine is a kind of vertical type decoration vacuum coater working by means of both evapo-ration and magnetron sputtering .It is mainly adpoted in the sueface of metallic precessing ,plast-ic , ceramic ,metal and glass materials. being a vertical type coater,it has all the advantages of hori-zontal type coater, and can load heavy work pieces.
Main Features:
1.Using developed type of high vacuum system ,quicker pumping down speed , higher efficiency, p-ower saving, lowing noise, and long service time.
2.The power supply for metallization includes DC cylindrical target power supply, DC high voltage b-ombardment power supply, and medium frequency power supply.
Main configuration:
- The vacuum chamber is a vertical type with double door structure,the camber is made by high quality stainless steel(SUS304) .
- The vacuum system is composed of high vacuum oil diffusion pump, Roots vacuum pump ,mechanical vacuum pump and the a water vapor cryopump.
- The power supply for mataillization includes DCcylindrical taget power supply,DC high voltage bombarment power supply ,and medium frequency power supply
- The control system (touch screen + PLC) displays detailed parameters at real time and controls the entire production process fully automatically under automatic running mode.
- The structure is simple, reasonable, highly production efficiency ,small area,simple operation.
- The cooling system is equipped with an automatic hydraulic pressure deficiency alarm device according to the design requirement .
- The electrical control system is equipped with multiple protecting devices for hydraulic pressure ,power failure and incorrectoperation to contrlo the entire production progress automatically with touch screen and PLC)
Technical parameters:
1).Pumping time(new,idling):2*10-2pa<8min
2).Ultimate vacuum:≤8*10-4pa
3).Work piece rotating speed: 0—20r/min
4).Weight:5000KG
5).Dimension:4.2*5*3.2M
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